Publisher : The Korean Institute of Electrical and Electronic Material Engineers
DOI : 10.4313/JKEM.2016.29.1.6
Title & Authors
Effects of Soft Baking Temperature on the Properties of Solution Processed Zn-Sn-O Thin-Film Transistors Lee, Jae-Won; Cho, Won-Ju;
In this study, the effects of soft baking temperature on the solution derived ZTO (Zn-Sn-O) TFTs (thin-film transistors) as a In-free oxide semiconductor were investigated. In spite of the same hard baking at high temperature(), the electrical properties of ZTO TFT was greatly changed by a small difference in soft baking temperature(). The performance of TFT was deteriorated as the soft baking temperature increased. Therefore, it is important to remove the water-related defects well as organic impurities from the ZTO films during soft baking for fabrication of solution-derived high performance of TFTs.