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A Position Decision of Photo Sensor using a PZT Nano Positioning Stage
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 Title & Authors
A Position Decision of Photo Sensor using a PZT Nano Positioning Stage
Cha, Young-Youp;
 
 Abstract
For machining systems like the motor driven linear stage which have high precision positioning with a long stroke, it is necessary to examine the repeatability of the reference position decision. Though piezo (PZT) actuator driven linear stages have high precision feed drivers and a short stroke, they have some limitations for reference position decisions if they have not been equipped with an accurate home sensor. This study was performed to examine the repeatability for home position decision of a EE-SX671 photo sensor as a home switch by using piezo actuator driven linear stages and capacitance probe.
 Keywords
photomicrosensor;position decision;
 Language
Korean
 Cited by