JOURNAL BROWSE
Search
Advanced SearchSearch Tips
A Study on the Optimal Design of 5 kW Plasma Discharger
facebook(new window)  Pirnt(new window) E-mail(new window) Excel Download
 Title & Authors
A Study on the Optimal Design of 5 kW Plasma Discharger
Noh, Hyun-Kyu; Shin, Chul-Jun; Lee, Jun-Young;
  PDF(new window)
 Abstract
This paper presents a study on the design optimization of a 5 kW plasma discharger for driving plasma reactor. The proposed study is composed of a high-frequency inverter based on the full-bridge circuit using soft switching techniques for high-frequency switching. The switching frequency in the operating region is the area of 130-200 kHz. By applying the LC resonance technique and a variable switching frequency, control technique is designed to be stable under changes in the load characteristics of the plasma reactor. This paper presents a quantitative analysis technique for design optimization. Experiments are performed according to load characteristic variations depending on the vacuum of the plasma reactor. This paper has verified the topology and design method for the 5 kW plasma discharger design.
 Keywords
High frequency inverter;Plasma discharger;Plasma power supply;Plasma reactor;Resonant inverter;
 Language
Korean
 Cited by
 References
1.
W. H. Shin, K. P. Yun, H. M. Jeoung, and J. H. Choi, "AC plasma power supply with variable voltage and variable frequency," The Korean Institute of Electrical Engineers, pp. 1205-1207, July 2004.

2.
B. H. Lee and I. S. Lee, "Development of a high-capacity power supply using IGBT for plasma devices," Journal of Korean Institute of Information Technology, Vol. 11, No. 6, pp. 25-32, June 2013.

3.
W. C. Lee and T. K. Lee, "The study on reactor parameters of atmosphere plasma power supply," The Korean Institute of Illuminating and Electrical Installation Engineers, Vol. 26, No. 6, pp. 59-65, June 2012.

4.
J. H. Kim, W. S. Lee, J. J. Ahn, C. Y. Won, D. K. Choi, and S. D. Choi, "A study on the design of the high power active clamp ZVS flyback converter for semiconductor plasma etching system," Power Electronics Annual Conference, pp. 400-403, Jul. 2000.

5.
M. Y. Kim, K. D. Seo, H. M. Han, B. J. Choi, and J. S. Kim, "A study on soft switching boost type power supply using load resonance for atmospheric pressure plasma generation," Power Electronics Annual Conference, pp. 25-28, Oct. 2008.

6.
S. I. Hong and M. S. Ryu, "A study on high-frequency of series-parallel resonant inverterusing the IGBT," Power Electronics Annual Conference, pp. 110-113, Jul. 1999.

7.
C. Y. Oh, J. S. Kim, and B. K. Lee, "Design of optimal resonant frequency for series-loaded resonant DC-DC converter in EVs on-board battery charger application," The Transactions of Korean Institute of Power Electronics, Vol. 17, No. 1, pp. 77-84, Feb. 2012. crossref(new window)

8.
S. K. Kwon and S. P. Mun, "Development of arc welding machines DC-DC converter using a novel full-bridge soft switching PWM inverter," Journal of the Korean Institute of Illuminating and Electrical Installation Engineers, Vol. 22, No. 6, pp. 26-33, Jun. 2008.

9.
S. T. Jou, H. G. Jeong, and K. B. Lee, "Design of a power system with variable voltage and frequency for a plasma discharger," Power Electronics Annual Conference, pp. 386-387, July 2011.

10.
J. Y. Lee, K. S. Choi, and S. C. Hahn, "Eddy current loss analysis of power transformer using finite element method," The Korean Institute of Electrical Engineers, pp. 71-73, Oct. 2008.