JOURNAL BROWSE
Search
Advanced SearchSearch Tips
A Consideration on the Process Technology and Application of MEMS to prepare for upcoming MEMS-based technological paradigm
facebook(new window)  Pirnt(new window) E-mail(new window) Excel Download
 Title & Authors
A Consideration on the Process Technology and Application of MEMS to prepare for upcoming MEMS-based technological paradigm
Ko, Yun-Seok;
  PDF(new window)
 Abstract
Recently, in the electric, electronic, robotic, and medical industries, a great attention has been paid to the development of MEMS-based smart devices with a compact size and highly intelligency. The MEMS technology is very effective in designing into a compact size and lightweight by combining into one the complex electrical, mechanical, chemical, and biological features which are required by smart devices, and at the same time, in bulk batch manufacturing. Therefore, this study, to prepare for upcoming new MEMS-based technological paradigm, analyzes MEMS processes and then considers its Applications.
 Keywords
MEMS(Micro Electro Mechanical System);Smart Device;Inertia Sensor;Lap On A Chip;
 Language
Korean
 Cited by