Advanced SearchSearch Tips
Surface wave excited plasma CVD technologies for the synthesis of carbon nanomaterials
facebook(new window)  Pirnt(new window) E-mail(new window) Excel Download
  • Journal title : Vacuum Magazine
  • Volume 2, Issue 4,  2015, pp.16-26
  • Publisher : The Korean Vacuum Society
  • DOI : 10.5757/vacmac.2.4.16
 Title & Authors
Surface wave excited plasma CVD technologies for the synthesis of carbon nanomaterials
Kim, Jaeho;
  PDF(new window)
Carbon nanomaterials including nanocrystalline diamond and graphene films are expected to play a core role in century industries due to their amazing physicochemical properties. To achieve their practical utilization and industrialization, the development of their mass production technologies is strongly required. Recently, a surface wave excited plasma (SWP) which is produced using microwaves has been attracting special attentions as a candidate for the mass production technology of carbon nanomaterials. SWP can allow a low-temperature large-area plasma chemical vapor deposition (CVD) system. Here, this article introduces the promising SWP-CVD technology. Plasma characteristics in a SWP will be introduced in detail to help understanding how to use and control a SWP as a plasma source for CVD applications.
 Cited by
J. Kim, T. Itagaki, M. Katsurai, Electrical Engineering in Japan, 145 (2), 10 (2003).

J. Kim and M. Katsurai, J. Appl. Phys., 101, 023301 (2007). crossref(new window)

J. Kim, K. Tsugawa, M. Ishihara, Y. Koga, M. Hasegawa, Plasma Sources Sci. Technol. 19, 015003 (2010). crossref(new window)

J. Kim, M. Ishihara, Y. Koga, K. Tsugawa, M. Hasegawa, S. Iijima, Appl. Phys. Lett. 98, 091502 (2011). crossref(new window)

J. Kim, H. Ohsaki, and M. Katsurai, IEEE Trans. Plasma Sci., 43, 480 (2015). crossref(new window)

W. P. Allis, S. J. Buchsbaum, and A. Bers, "Waves in anisotropic plasmas", MIT Press, Cambridege, Massachusetts (1963).

M. Moisan, C. Beaudry, and P. Leprince, Phys. Lett. 50A, 125 (1974).

K. Komachi and S. Kobayashi, J. Microwave Power and Electromagnetic Energy, 24, 140 (1989). crossref(new window)

Y. M. Aliev, H. Schluter, and A. Shivarova, "Guided-wave-produced plasmas", Springer-Verlag (2000).

K. Tsugawa, M. Ishihara, J. Kim, Y. Koga, M. Hasegawa, Physical Review B, 82, 125460 (2010). crossref(new window)