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Plasma Monitoring by Multivariate Analysis Techniques
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  • Journal title : Vacuum Magazine
  • Volume 2, Issue 4,  2015, pp.27-32
  • Publisher : The Korean Vacuum Society
  • DOI : 10.5757/vacmac.2.4.27
 Title & Authors
Plasma Monitoring by Multivariate Analysis Techniques
Jang, Haegyu; Koh, Kyongbeom; Lee, Honyoung; Chae, Heeyeop;
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 Abstract
Plasma diagnosis and multivariate analysis techniques for plasma processes are reviewed. The principles and applications of optical emission spectroscopy (OES) and VI probe are discussed briefly. The research results of principal component analysis (PCA), one of the widely used multivariate analysis techniques for plasma process monitoring is discussed in this article.
 Keywords
 Language
Korean
 Cited by
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