Publisher : The Korean Microelectronics and Packaging Society
DOI : 10.6117/kmeps.2015.22.3.073
Title & Authors
Fabrication of Monolithic Spectrometer Module Based on Planar Optical Waveguide Platform using UV Imprint Lithography Oh, Seung hun; Jeong, Myung yung; Kim, Hwan gi; Choi, Hyun young;
This paper presents integrated polymeric spectrometer module which offers compact size, easily-fabricated structure and low cost. The proposed spectrometer module includes the nano diffraction grating with non-uniform pitch and planar optical waveguide with concave mirror to be fabricated by UV imprint lithography. To increase the reflection efficiency, we designed the nano diffraction grating with triangular profiles. The polymeric planar spectrometer includes a spectral bandwidth of 700 nm, resolution of 10 nm and precision below 5 nm. This polymeric planar spectrometer is well-suited for sensor system.