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PLC Devices Fabricated on Flexible Plastic Substrate by Roll-to-Roll Imprint Lithography
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 Title & Authors
PLC Devices Fabricated on Flexible Plastic Substrate by Roll-to-Roll Imprint Lithography
Kang, Ho Ju; Kim, Taehoon; Jeong, Myung Yung;
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Demand for a low-cost, high-throughput, and high-resolution patterning method for fabricating devices continues to increase. The roll-to-roll (R2R) imprint lithography technique has received a great deal of attention as a means of fabricating next-generation devices. In this paper, we propose a fabrication method for polymeric planar lightwave circuit (PLC) devices that uses R2R imprint lithography. The proposed technique uses an elastomeric polydimethylsiloxane (PDMS) mold. A Si wafer with micro patterns is used as the Si master. The PDMS mold is then replicated from the Si master. By applying a precise web tension and at a given web speed, we fabricated a micro-patterned PLC device. The insertion losses were 4.0 dB for a optical splitter. As such, the proposed method of fabricating a PLC device by the R2R process was shown to be an effective solution.
Planar lightwave circuit;Polymeric roll mold;R2R process;Roll-to-Roll imprint lithography;Optical interconnection;
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