JOURNAL BROWSE
Search
Advanced SearchSearch Tips
Hybrid Fabrication of Screen-printed Pb(Zr,Ti)O3 Thick Films Using a Sol-infiltration and Photosensitive Direct-patterning Technique
facebook(new window)  Pirnt(new window) E-mail(new window) Excel Download
 Title & Authors
Hybrid Fabrication of Screen-printed Pb(Zr,Ti)O3 Thick Films Using a Sol-infiltration and Photosensitive Direct-patterning Technique
Lee, J.-H.; Kim, T.S.; Park, H.-H.;
  PDF(new window)
 Abstract
In this paper, we propose a fabrication technique for enhanced electrical properties of piezoelectric thick films with excellent patterning property using sol-infiltration and a direct-patterning process. To achieve the needs of high-density and direct-patterning at a low sintering temperature (< ), a photosensitive lead zirconate titanate (PZT) solution was infiltrated into a screen-printed thick film. The direct-patterned PZT films were clearly formed on a locally screen-printed thick film, using a photomask and UV light. Because UV light is scattered in the screen-printed thick film of a porous powder-based structure, there are needs to optimize the photosensitive PZT sol infiltration process for obtaining the enhanced properties of PZT thick film. By optimizing the concentration of the photosensitive PZT sol, UV irradiation time, and solvent developing time, the hybrid films prepared with 0.35 M of PZT sol, 4 min of UV irradiation and 15 sec solvent developing time, showed a very dense with a large grain size at a low sintering temperature of . It also illustrated enhanced electrical properties (remnant polarization, , and coercive field, ). The value was over four times higher than those of the screen-printed films. These films integrated on silicon wafer substrate could give a potential of applications in micro-sensors and -actuators.
 Keywords
Photosensitive PZT sol;screen-printed thick film;densification;direct-patterning;piezoelectric;
 Language
Korean
 Cited by
 References
1.
J. H. Park, T. Y. Kwon, D. S. Yoon, H. Kim and T. S. Kim, "Fabrication of microcantilever sensors actuated by piezoelectric $Pb(Zr_{0.52}Ti_{0.48})O_3$ Thick films and determination of their electromechanical characteristics", Adv. Funct. Mater., 15, 2021 (2005). crossref(new window)

2.
G. Lim, S. Joe, S. Kim and W.-T. Park, "Cantilever Structural Analysis for Optimal Piezoelectric Power Harvesting", J. Microelectron. Packag. Soc., 20(4), 31 (2013).

3.
T. Zawada, K. Hansen, R. Lou-Moeller, E. Ringgaard, T. Pedersen and E. V. Thomsen, "High-performance piezoelectric thick film based energy harvesting micro-generators for MEMS", Procedia. Engineering, 5, 1164 (2010). crossref(new window)

4.
Z. Wang, W. Zhu, H. Zhu, J. Miao, C. Chao, C. Zhao and O. Tan, "Fabrication and Characterization of Piezoelectric Micromachined Ultrasonic Transducers with Thick Composite PZT Films", IEEE transact. Ultraso. Ferroele. Freq. Contr., 52, 2289 (2005). crossref(new window)

5.
T. Y. Kwon, K. Eom, J. H. Park, D. S. Yoon, H. L. Lee and T. S. Kim, "In situ real-time monitoring of biomolecular interactions based on resonating microcantilevers immersed in a viscous fluid", Appl. Phys. Lett., 90, 223903 (2007). crossref(new window)

6.
R. Xu, A. Lei, C. Dahl-Petersen, K. Hansen, M. Guizzetti, K. Birkelund and E. V. Thomsen, O. Hansen, "Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting", Sens. Actuators A: Physical, 188, 383 (2012).

7.
E. E. Aktakka, R. L. Peterson and K. Najafi "High Stroke and High Deflection Bulk-PZT Diaphragm and Cantilever Micro Actuators and Effect of Pre-Stress on Device Performance", J. Microelectromech. Syst., 23, 438 (2014). crossref(new window)

8.
X.-H. Xu and J.-R. Chu, "Preparation of a high-quality PZT thick film with performance comparable to those of bulk materials for applications in MEMS", J. Micromech. Microeng, 18, 065001 (2008). crossref(new window)

9.
A. Sachdeva and R. P. Tandon, "Effect of sol composition on dielectric and ferroelectric properties of PZT composite films", Ceram. Interna., 38(2), 1331 (2012). crossref(new window)

10.
J. H. Park, H. Kim, D. S. Yoon, Y. K. Yoo, J. Lee and T. S. Kim, "Effects of the material properties on piezoelectric PZT thick film micro cantilevers as sensors and self actuators", J. Electroceram., 25, 1 (2009).

11.
W.-J. Han, B.-Y. Yoo and H.-H. Park, "A study on the agglomeration of BaTiO3 nanoparticles with differential synthesis route", J. Microelectron. Packag. Soc., 22(2), 33 (2015). crossref(new window)

12.
T. Y. Kwon, J. H. Park, Y. B. Kim, D. S. Yoon and T. S. Kim, "Preparation of piezoelectric $0.1Pb(Zn_{0.5}W0_{.5})O_3-0.9Pb(Zr_{0.5}Ti_{0.5})O_3$ solid solution and thick films for low temperature firing on a Si-substrate", J. Cryst. Growth., 295, 172 (2006). crossref(new window)

13.
S.-M. Lee, S.-H. Lee, C.-B. Yoon, H.-E. Kim and K.-W. Lee, "Low-temperature sintering of $MnO_2$-doped PZT-PZN Piezoelectric ceramics" J. Electroceramics, 18, 311 (2007). crossref(new window)

14.
C. Lucaty, F. Menily and R. V. D. Muhll, "Thick-film densification for pyroelectric sensors", Meas. Sci. Technol., 8, 38 (1997). crossref(new window)

15.
J. Perez, N. P. Vyshatko, P. M. Vilarinho and A. L. Kholkin, "Electrical properties of lead zirconate titanate thick films prepared by hybrid sol-gel method with multiple infiltration steps", Mater. Chem. Phys., 101, 280 (2007). crossref(new window)

16.
T. Kobayashi, M. Ichiki, R. Kondou, K. Nakamura and R. Maeda, "Degradation in the ferroelectric and piezoelectric properties of $Pb(Zr,Ti)O_3$ thin films derived from a MEMS microfabrication process", J. Micromech. Microeng., 17, 1238 (2007). crossref(new window)

17.
K. Zheng, J. Lu and J. Chu, "A Novel Wet Etching Process of $Pb(Zr,Ti)O_3$ Thin Films for Applications in Microelectromechanical System", Japa. J. Appl. Phys., 43, 3934 (2004). crossref(new window)

18.
S. Ezhilvalavan and V. D. Samper, "Ferroelectric properties of wet-chemical patterned$PbZr_{0.52}Ti_{0.48}O_3 $ films", Appl. Phys. Lett., 86, 072901 (2005). crossref(new window)

19.
S.-W. Bae, H.-H. Park and T. S. Kim, "Ferroelectric properties of direct-patterned half-micron thick PZT film", Sens. Actuators A: Physical, 125, 548 (2006).

20.
J.-S. Hwang, W. S. Kim, H.-H. Park and T. S. Kim, "The effect of intermediate anneal on the ferroelectric properties of direct-patternable PZT films", Sens. Actuators A: Physical, 117, 137 (2005).