JOURNAL BROWSE
Search
Advanced SearchSearch Tips
Influence of Electron Irradiation on the Structural Electrical and Optical Properties of ITO/Ti bi-layered Films
facebook(new window)  Pirnt(new window) E-mail(new window) Excel Download
 Title & Authors
Influence of Electron Irradiation on the Structural Electrical and Optical Properties of ITO/Ti bi-layered Films
Moon, Hyun-Joo; Jeon, Jae-Hyun; Song, Young-Hwan; Oh, Jung-Hyun; Gong, Tae-Kyung; Choi, Dong-Hyuk; Son, Dong-Il; Kim, Daeil;
  PDF(new window)
 Abstract
We have considered the influence of electron irradiation on the optical and electrical properties of bi-layered films prepared with RF and DC magnetron sputtering. The thin films irradiated at 600 eV shows the lowest resistivity of . The optical transmittance in a visible wave length region also influenced with the electron irradiation energy. The film that electron irradiated at 600 eV shows 82.9% of optical transmittance in this study. By comparison of figure of merit, it is concluded that the opto-electrical performance of bi-layered film is improved with electron irradiation.
 Keywords
;Ti;Magentron sputtering;Electron irradiation;Figure of Merit;
 Language
Korean
 Cited by
 References
1.
S. Karthikeyan, A. E. Hill and R. D. Pilkington : Thin Solid Films, 550 (2014) 140. crossref(new window)

2.
Y. S. Kim, J. H. Park and D. Kim : Vacuum, 82 (2008) 57.

3.
M. H. Ahn, E. S. Cho and S. J. Kwon : Vacuum, 101 (2014) 221. crossref(new window)

4.
P. H. Lei, C. M. Hsu and Y. S. Fan : Organic Electronics, 14 (2013) 236. crossref(new window)

5.
F. F. Ngaffo, A. P. Caricato and F. Romano : Appl. Surf. Sci., 255 (2009) 9684. crossref(new window)

6.
D. Kim : Appl. Surf. Sci., 256 (2010) 1774. crossref(new window)

7.
S. B. Heo, J. Y. Chun, Y. J. Lee, H. M. Lee and D. Kim : J. Kor. Soc. Heat Treat., 25 (2012) 134. crossref(new window)

8.
S. Song, T. Yang, J. Liu, Y. Xin, Y. Li, S. Han, Appl. Surf. Sci., 257 (2011) 7061. crossref(new window)

9.
B. D. Cullity : Elements of X-ray diffractions, Addition-Wesley, Reading, MA, (1978) 102-121.

10.
D. Kim : J. Kor. Soc. Heat Treat., 24 (2011) 199.

11.
Y. S. Kim, S. B. Heo, H. M. Lee, Y. J. Lee, I. S, Kim, M. S. Kang, D. H. Choi, B. H. Lee, M. G. Kim and D. Kim : Appl, Surf, Sci., 258 (2012) 3903. crossref(new window)

12.
G. Haacke : J. Appl. Phys., 47 (1976) 4086. crossref(new window)