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Characteristics of Heat Transfer in DLG Platen According to Flow Rate of Coolant
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  • Journal title : Tribology and Lubricants
  • Volume 32, Issue 2,  2016, pp.50-55
  • Publisher : The Korean Society of Tribologists and Lubrication Engineers
  • DOI : 10.9725/kstle.2016.32.2.50
 Title & Authors
Characteristics of Heat Transfer in DLG Platen According to Flow Rate of Coolant
Kim, Dongkyun; Kim, Jongyun; Lee, Hyunseop;
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Recently, a double-side machining process has been adopted in fabricating a sapphire glass to enhance the manufacturability. Double-side lap grinding (DLG) is one of the emerging processes that can reduce process steps in the fabrication of sapphire glasses. The DLG process uses two-body abrasion with fixed abrasives including pallet. This process is designed to have a low pressure and high rotational speed in order to obtain the required material removal rate. Thus, the temperature is distributed on the DLG platen during the process. This distribution affects the shape of the substrate after the DLG process. The coolant that is supplied into the cooling channel carved in the base platen can help to control the temperature distribution of the DLG platen. This paper presents the results of computational fluid dynamics with regard to the heat transfer in a DLG platen, which can be used for fabricating a sapphire glass. The simulation conditions were 200 rpm of rotational speed, 50℃ of frictional temperature on the pallet, and 20℃ of coolant temperature. The five cases of the coolant flow rate (20~36 l/min) were simulated with a tetrahedral mesh and prism mesh. The simulation results show that the capacity of the generated cooling system can be used for newly developed DLG machines. Moreover, the simulation results may provide a process parameter influencing the uniformity of the sapphire glass in the DLG process.
double-side lap grinding;sapphire glass;heat transfer;temperature distribution;
 Cited by
Kim, H., Manivannan, R., Moon, D., Xiong, H., Park, J., “Evaluation of double sided lapping using a fixed abrasive pad for sapphire substrates”, Wear, Vol. 302, pp. 1340-1344, 2013. crossref(new window)

Yang, W. Y., Sung, I. H., “Study on Within-Wafer Non-uniformity Using Finite Element Method”, J. Korean Soc. Tribol. Lubr. Eng., Vol. 28, No. 1, pp. 7-11, 2012.

Lee, T. K., Kim, H. J., Jo, H. H., Ryu, H. Y., Jeong, H. D., “Study on the Effect of a Platen Flatness on the Shape of a Wafer in Mechanical Lapping of Sapphire”, Proc. Autumn Conference of KSPE, pp. 113-114, 2010.

Deshpande, L. S., Raman, S., Sunanta, O., Agbaraji, C., “Observations in the flat lapping of stainless steel and bronze,” Wear, No. 265, pp. 105-116, 2008.

Molenda, J., Barylski, A., “The influence of abrasive machine on temperature during one side lapping,” J. KONES Power and Trans., Vol. 17, No. 2, pp. 357-362, 2001.

Kim, D. K., Kim, J. Y., Lee, H. S., Lee. S. J., “Characteristics of heat transfer by coolant channel in DLG process,” Proc. 61th Autumn Conference of the KSTLE, pp. 91-92, 2015.

ANSYS Fluent User’s Guide, ANSYS, Inc., November, 2013.

Sobieski, W., “Examples of Using the Finite Volume Method for Modeling Fluid-Solid Systems,” Techn. Sc., No. 13, pp. 256-265, 2010.