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A Study on Impurity Deposition using of ITO Substrate
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 Title & Authors
A Study on Impurity Deposition using of ITO Substrate
Park, Jung-Cheul; Chu, Soon-Nam;
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 Abstract
In this paper, we have studied a sheet resistance property of N- and P-type thin films deposited on ITO glass by use of RF magnetron sputtering. The N-type samples which has the deposition condition of 150W RF power, shows the highest current value, and the samples deposited for 15 minutes shows a better Ohmic contact property. As the substrate temperature, RF power and deposition time are increased, the sheet resistance of the samples is increased, and the low sheet resistance sample shows a better I-V property. The P-type samples shows the highest current value by 150W RF power condition as similar as N-type samples. and the samples deposited for 20 minutes shows a better ohmic contact property. The sheet resistance of the both types samples is increased as increasing RF power and deposition time.
 Keywords
ITO glass;RF power;RF magnetron sputtering;substrate temperature;ohmic contact;
 Language
Korean
 Cited by
 References
1.
Chang-Bong Kim,"The Study on the Reflectin Coating Design Scheme in the Thin-Film Silicon Solar Cell", Journal of the Korea Academia-I industrial Cooperation Society, Vol.12, No.11 pp.5172-5177,2011

2.
Tae-Wook Kim, Hyung-Yun Kong,"Spectrum Sensing Method of Cognitive Network applying Energy Harvesting" The Journal of The Institute of Internet, Broadcasting and Communication (JIIBC), Vol.15. N0.3, pp.73-76, June 2015 crossref(new window)

3.
M.S.Jeon, S.Yoshiba and Koichi Kamisako, "Intrinsic amorphous silicon(a-Si:H) thin film prepared by using remote plasma chemical vapor deposition methond and used as a passivation layer for a heterojuncion solar cell",J.Korean Phys,Soc, 54, pp. 194-199, 2009 crossref(new window)

4.
C. Li, G. Fang, Y. Ren, Q.Fu and X. Zhah,"Silver nanoisland induced synthesis of ZnO nanostructures by vapor phase transport", J.Nanoscience and Nanotechnology, Vol. 6, PP.1467-1473,2006 crossref(new window)

5.
A. Bolonkin, "New concept of high speed AB solar cell",IEEE Transactions on Aerospace and Electronic Systems,Vol.44, pp.1538-1542, 2008 crossref(new window)

6.
W. Shockley, H. J. Queisser, "Detailed Balance Limit of Efficiency of p-n Junction solar celles", J. Appl. Phys. 32, pp.510-519, 1961. crossref(new window)

7.
M. Lu , "Silicon Heterojunction Solar Cell and Crystallization of Amorphous Silicon", ProQuest, pp. 61-70, 2008.

8.
A. McEvoy, L. Castaner, T. Markvart, "Solar cells(Materials, Manufacture and Operation)", Academic Press, pp. 5-18, 2012.