Simulation of Modeling Characteristics of Pumping Design Factor on Vacuum System

Title & Authors
Simulation of Modeling Characteristics of Pumping Design Factor on Vacuum System
Kim, Hyung-Taek; Cho, Han-Ho;

Abstract
Recently, with the development of advanced thin film devices comes the need for constant high quality vacuum as the deposition pressure is more demanding. It is for this reason our research seeks to understand how the variable design factors are employed in such vacuum systems. In this study, the effects of design factor applications on the vacuum characteristics were simulated to obtain the optimum design modeling of variable models on an ultra high vacuum system. The commercial vacuum system simulator, $\small{VacSim^{(multi)}}$, was used in our investigation. The reliability of the employed simulator was verified by the simulation of the commercially available models of ultra high vacuum system. Simulated vacuum characteristics of the proposed modeling aligned with the observed experimental behavior of real systems. Simulated behaviors showed the optimum design models for the ideal conditions to achieve optimal pressure, pumping speed, and compression ratio in these systems.
Keywords
Vacuum system;Design factor;Pumping system;Vacuum characteristics;Vacuum simulation;
Language
English
Cited by
References
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