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Al2O3 Coating on Transparent Polycarbonate Substrates for the Hard-coating Application
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 Title & Authors
Al2O3 Coating on Transparent Polycarbonate Substrates for the Hard-coating Application
Kim, Hun; Nam, Kyoung-Hee; Jang, Dong-Su; Lee, Jung-Joong;
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Transparent aluminum oxide films were deposited on polycarbonate (PC) substrates by inductively coupled plasma (ICP) assisted reactive sputtering. the oxygen flow rate was regulated by controlling the target voltage with a proportional integrate derivative controller. The PC substrate was treated with plasma prior to the deposition in order to the enhance the adhesive strength of the film. The characteristics of hardness, structure, density, transmittance, deposition rate, surface roughness and residual stress were investigated to estimate the possibility for the hard coating.
Polycorbonote;ICP;Aluminum Oxide;Hard coating;Residual stress;
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전자-빔 조사를 이용한 TiN 박막의 물성변화에 관한 연구,신창호;성영종;임성열;신기욱;정철우;김선광;김준호;유용주;김대일;

열처리공학회지, 2010. vol.23. 1, pp.29-33
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