Publisher : The Korean Institute of Surface Engineering
DOI : 10.5695/JKISE.2007.40.4.159
Title & Authors
Al2O3 Coating on Transparent Polycarbonate Substrates for the Hard-coating Application Kim, Hun; Nam, Kyoung-Hee; Jang, Dong-Su; Lee, Jung-Joong;
Transparent aluminum oxide films were deposited on polycarbonate (PC) substrates by inductively coupled plasma (ICP) assisted reactive sputtering. the oxygen flow rate was regulated by controlling the target voltage with a proportional integrate derivative controller. The PC substrate was treated with plasma prior to the deposition in order to the enhance the adhesive strength of the film. The characteristics of hardness, structure, density, transmittance, deposition rate, surface roughness and residual stress were investigated to estimate the possibility for the hard coating.