Statistical Analysis of Characteristics of Scanning Electron Microscope

Title & Authors
Statistical Analysis of Characteristics of Scanning Electron Microscope
Kim, T.S.; Kim, W.; Kim, D.H.; Kim, B.;

Abstract
A scanning electron microscope (SEM) is a complex system, consisting of many sophisticated components. For a systematic characterization, a $\small{2^4}$ full factorial experiment was conducted. The SEM components examined include condenser lens 1 and 2 (denoted as A and B, respectively), and Objective lens (coarse and fine-denoted as C and D respectively). A statistical analysis was conduced to investigate factor effects and variations In response surfaces. Among four factors, main effect analysis revealed that A and D were Identified as the dominant factor. Moreover, B showed conflicting effect against C. The $\small{R^2}$ of statistical regression model constructed was about 69.6%. The model generated 3D response surface plots facilitated understanding of complex tactor effects.
Keywords
SEM;Statistical analysis;Main effect;Response surface model;
Language
Korean
Cited by
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