Publisher : The Korean Institute of Surface Engineering
DOI : 10.5695/JKISE.2007.40.6.245
Title & Authors
Effects of Reactive Gas Addition on the Mechanical Property and Water Permeability of IZO Films Deposited by DC Sputtering for Application to Flexible OLED Cheon, Ko-Eun; Lee, Dong-Yeop; Cho, Young-Rae; Song, Pung-Keun;
Amorphous IZO films were deposited on PET substrate by DC magnetron sputtering without substrate heating. In order to investigate effect of reactive gas addition on film properties, 0.2-0.4% of or gas was introduced during the deposition. Deposited IZO films were evaluated with mechanical property, electrical property, and water permeability. In the case of gas addition, mechanical property showed clear degradation compared to gas. In the case of gas, water permeability of the IZO film was increased compared to gas which could be attributed to the low adhesion of the film caused by bombardment of high energy negative oxygen ion. As a result, it is confirmed that water permeability of the film could be strongly affected by adhesion of the film.