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Microstructure and Mechanical Properties of Cr-Mo-Si-C-N Coatings Deposited by a Hybrid Coating System
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 Title & Authors
Microstructure and Mechanical Properties of Cr-Mo-Si-C-N Coatings Deposited by a Hybrid Coating System
Yun, Ji-Hwan; Ahn, Sung-Kyu; Kim, Kwang-Ho;
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Cr-Mo-Si-C-N coatings were deposited on steel and Si wafer by a hybrid system of AIP and sputtering techniques using Cr, Mo and Si target in gaseous mixture. Instrumental analyses of XRD and XPS revealed that the Cr-Mo-Si-C-N coatings must be a composite consisting of fine(Cr, Mo and Si)(C and N) crystallites and amorphous and SiC. The hardness value of Cr-Mo-Si-C-N coatings significantly increased from 41 GPa of Cr-Mo-C-N coatings to about 53 GPa with Si content of 9.3 at.% due to the refinement of (Cr, Mo and Si)(C and N) crystallites and the composite microstructure characteristics. A systematic investigation of the microstructures and mechanical properties of Cr-Mo-Si-C-N coatings prepared with various Si contents is reported in this paper.
Cr-Mo-Si-C-N;Hybrid system;Microstructure;Mechanical properties;
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