Publisher : The Korean Institute of Surface Engineering
DOI : 10.5695/JKISE.2008.41.5.205
Title & Authors
Characterization of a Magnetron Sputtering Cathode by a 3D Particle Model Joo, Jung-Hoon;
A 3D particle code is developed to analyze electron behavior in a planar magnetron sputtering cathode either in balanced or unbalanced configuration. Three types of collisions are included; electron - neutral elastic, excitation to a metastable state and ionization. Flight path is calculated by a 4-th order Runge-Kutta method with a time step of 10 ps. Effects of electron starting position, magnetic field intensity and configuration were analyzed. For a more efficient and accurate modeling, multithreading technique is considered for multicore CPU computers. Under an assumption of cold ion approach, target erosion profiles are predicted for a flat target surface.