Publisher : The Korean Institute of Surface Engineering
DOI : 10.5695/JKISE.2008.41.6.331
Title & Authors
Fabrication of High Ordered Nano-sphere Array on Curved Substrate by Nanoimprint Lithography Hong, S.H.; Bae, B.J.; Kwak, S.U.; Lee, H.;
The replica of highly ordered nano-sphere array patterns were fabricated using hot embossing method. First, silica nano-sphere array on Si substrate was transferred to PVC film at and 7 bar using hot embossing process. Then, silica nano-sphere array on PVC template was removed by soaking the PVC film in buffered oxide etcher. In order to form anti-stiction layer, the PVC template was coated with silicon dioxide layer and self-assembled monolayer. Through UV nanoimprint lithography with the fabricated flexible PVC template, highly ordered nano-sphere array pattern was imprinted on curved substrates with high fidelity.