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Fabrication of High Ordered Nano-sphere Array on Curved Substrate by Nanoimprint Lithography
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 Title & Authors
Fabrication of High Ordered Nano-sphere Array on Curved Substrate by Nanoimprint Lithography
Hong, S.H.; Bae, B.J.; Kwak, S.U.; Lee, H.;
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 Abstract
The replica of highly ordered nano-sphere array patterns were fabricated using hot embossing method. First, silica nano-sphere array on Si substrate was transferred to PVC film at and 7 bar using hot embossing process. Then, silica nano-sphere array on PVC template was removed by soaking the PVC film in buffered oxide etcher. In order to form anti-stiction layer, the PVC template was coated with silicon dioxide layer and self-assembled monolayer. Through UV nanoimprint lithography with the fabricated flexible PVC template, highly ordered nano-sphere array pattern was imprinted on curved substrates with high fidelity.
 Keywords
Nano-sphere;Flexible template;UV nanoimprint lithography;Curved substrate;
 Language
Korean
 Cited by
1.
Recovery of Heavy-Metallic Components from a Waste Electro-polishing Solution of 316L Steel by the Solar Cell Electricity, Journal of the Korean institute of surface engineering, 2009, 42, 1, 53  crossref(new windwow)
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