Advanced SearchSearch Tips
Fabrication of High Ordered Nano-sphere Array on Curved Substrate by Nanoimprint Lithography
facebook(new window)  Pirnt(new window) E-mail(new window) Excel Download
 Title & Authors
Fabrication of High Ordered Nano-sphere Array on Curved Substrate by Nanoimprint Lithography
Hong, S.H.; Bae, B.J.; Kwak, S.U.; Lee, H.;
  PDF(new window)
The replica of highly ordered nano-sphere array patterns were fabricated using hot embossing method. First, silica nano-sphere array on Si substrate was transferred to PVC film at and 7 bar using hot embossing process. Then, silica nano-sphere array on PVC template was removed by soaking the PVC film in buffered oxide etcher. In order to form anti-stiction layer, the PVC template was coated with silicon dioxide layer and self-assembled monolayer. Through UV nanoimprint lithography with the fabricated flexible PVC template, highly ordered nano-sphere array pattern was imprinted on curved substrates with high fidelity.
Nano-sphere;Flexible template;UV nanoimprint lithography;Curved substrate;
 Cited by
Recovery of Heavy-Metallic Components from a Waste Electro-polishing Solution of 316L Steel by the Solar Cell Electricity, Journal of the Korean institute of surface engineering, 2009, 42, 1, 53  crossref(new windwow)
J. M. Weissman, H. B. Sunkara, A. S. Tse, S. A. Asher, Science 274 (1996) 959 crossref(new window)

S. H. Park, Y. Xia, Langmuir, 15 (1999) 266 crossref(new window)

S. H. Sun, C. B. Murray, D. Weller, L. Folks, A. Moser, Science, 287 (2000) 1989 crossref(new window)

N. D. Denkov, O. D. Velev, P. A. Kralchevsky, I. B. Ivanov, H. Yoshimura, K. Nagayama, Nature, 361 (1993) 26

H. Miguez, F. Meseguer, C. Lopez, A. Blanco, J. S. Moya, J. Requena, A. Mifsud, V. Fornes, Adv. Mater., 10 (1989) 480 crossref(new window)

P. R. Krauss, S. Y. Chou, Appl. Phys. Lett., 71 (1997) 3174 crossref(new window)

S.-H. Hong, K.-S. Han, K.-J. Byeon, H. Lee, K.-W. Choi, Jpn. J. Appl. Phys., 47 (2008) 3699 crossref(new window)

S.-H. Hong, K.-S. Han, H. Lee, J. U. Cho, Y. K. Kim, J. Appl. Phys., 46 (2008) 6375

S.-H. Hong, B.-J. Bae, J.-Y. Hwang, S.-Y. Hwang, H. Lee, Microelectron. Eng. submitted