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The Application of DLC(diamond-like carbon) Film for Plastic Injection Mold by Hybrid Method of RF Sputtering and Ion Source
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 Title & Authors
The Application of DLC(diamond-like carbon) Film for Plastic Injection Mold by Hybrid Method of RF Sputtering and Ion Source
Kim, Mi-Seon; Hong, Sung-Pill;
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 Abstract
DLC film was synthesized on plastic injection mold(SKD11, ) and Si(100) wafer for 2 h at under 6 mTorr using hybrid method of rf sputtering and ion source. The obtained film was analysed by Raman spectroscopy, AFM, TEM, Nano indenter and scratch tester, etc. The film was defined as an amorphous phase. In the Raman spectrum, broad peak of -bonded carbon attributed to graphite at were observed, and the ratio of ID( diamond intensity)/IG( graphite intensity) was approximately 0.54. The adhesion of DLC film was more than 80 N with scratch tester when thickness Cr was coated as interlayer. The micro-hardness was distributed at 35~37 GPa. The friction coefficient was 0.02~0.07, and surface roughness(Ra) was 0.34~1.64 nm. The lifetime of DLC coated plastic injection mold using as a connector part in computer was more than 2 times of non-coated mold.
 Keywords
DLC;RF sputtering;Raman spectroscopy;Friction coefficient;Adhesion;
 Language
Korean
 Cited by
1.
하이브리드 선형이온원에 의한 유압 기어펌프용 Cr-DLC코팅막의 특성과 효율성능,차순용;김왕렬;박민석;권세훈;정원섭;강명창;

한국분말야금학회지, 2010. vol.17. 6, pp.456-463 crossref(new window)
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