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SAW Filter Made of ZnO/Nanocrystalline Diamond Thin Films
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 Title & Authors
SAW Filter Made of ZnO/Nanocrystalline Diamond Thin Films
Jung, Doo-Young; Kang, Chan-Hyoung;
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 Abstract
A surface acoustic wave (SAW) filter structure was fabricated employing thick nanocrystalline diamond (NCD) and thick ZnO films on Si wafer. The NCD film was deposited in an gas mixture by microwave plasma chemical vapor deposition method. The ZnO film was formed over the NCD film in an RF magnetron sputter using ZnO target and gas. On the top of the two layers, copper film was deposited by the RF sputter and inter digital transducer (IDT) electrode pattern (line/space : ) was defined by the photolithography including a lift-off etching process. The fabricated SAW filter exhibited the center frequency of 1.66 GHz and the phase velocity of 9,960 m/s, which demonstrated that a giga Hertz SAW filter can be realized by utilizing the nanocrystalline diamond thin film.
 Keywords
SAW filter;ZnO;Nanocrystalline diamond;Microwave plasma CVD;
 Language
Korean
 Cited by
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2.
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한국표면공학회지, 2013. vol.46. 1, pp.29-35 crossref(new window)
3.
초경합금에 나노결정질 다이아몬드 코팅 시 금속 중간층의 효과,나봉권;강찬형;

한국표면공학회지, 2013. vol.46. 2, pp.68-74 crossref(new window)
1.
Effect of DC Bias on the Growth of Nanocrystalline Diamond Films by Microwave Plasma CVD, Journal of the Korean institute of surface engineering, 2013, 46, 1, 29  crossref(new windwow)
2.
A Kinetic Study on the Growth of Nanocrystalline Diamond Particles to Thin Film on Silicon Substrate, Journal of the Korean institute of surface engineering, 2011, 44, 4, 131  crossref(new windwow)
3.
Effect of Metal Interlayers on Nanocrystalline Diamond Coating over WC-Co Substrate, Journal of the Korean institute of surface engineering, 2013, 46, 2, 68  crossref(new windwow)
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