Publisher : The Korean Institute of Surface Engineering
DOI : 10.5695/JKISE.2009.42.5.216
Title & Authors
SAW Filter Made of ZnO/Nanocrystalline Diamond Thin Films Jung, Doo-Young; Kang, Chan-Hyoung;
A surface acoustic wave (SAW) filter structure was fabricated employing thick nanocrystalline diamond (NCD) and thick ZnO films on Si wafer. The NCD film was deposited in an gas mixture by microwave plasma chemical vapor deposition method. The ZnO film was formed over the NCD film in an RF magnetron sputter using ZnO target and gas. On the top of the two layers, copper film was deposited by the RF sputter and inter digital transducer (IDT) electrode pattern (line/space : ) was defined by the photolithography including a lift-off etching process. The fabricated SAW filter exhibited the center frequency of 1.66 GHz and the phase velocity of 9,960 m/s, which demonstrated that a giga Hertz SAW filter can be realized by utilizing the nanocrystalline diamond thin film.