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Study on Adhesion of DLC Films with Interlayer
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 Title & Authors
Study on Adhesion of DLC Films with Interlayer
Kim, Gang-Sam; Cho, Yong-Ki;
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 Abstract
Adhesion of DLC film is very significant property that exhibits wear resistance, chemical inertness and high hardness when being deposited to metal substrate. This study was considered that change adhesion of DLC film produced by Plasma Enhanced Chemical Vapor Deposition can be presented through inserting interlayer (Cr, Si-C:H). The thickness of interlayer was result of changing adhesion and residual stress. It was showed that the maximum 12 N of adhesion is on DLC film of Cr interlayer, and that a tendency is to be increased residual stress depend on the thickness. DLC film of Si-C:H interlayer represented 16 N of adhesion at , whereas adhesion is decreased when the thickness is increased. For the interlayer at multi-layer, it was the best that adhesion of Cr/Si-C:H/DLC film was 33 N. Si-C:H interlayer at DLC film controled adhesion of the whole film. It was relaxed the internal stress of DLC film produced by inserting Cr, Si-C:H interlayer.
 Keywords
Diamond-like Carbon(a-C:H);Cr;Si-C:H;Adhesion;Residual stress;
 Language
Korean
 Cited by
1.
치아색으로 코팅된 NiTi 와이어의 전기화학적 특성,김원기;조주영;최한철;이호종;

Corrosion Science and Technology, 2010. vol.9. 5, pp.223-232
2.
통전성형 금형 부품 절연을 위한 Si-DLC코팅 기계적 특성 연구,김우영;이현우;양대호;홍성태;

한국자동차공학회논문집, 2015. vol.23. 6, pp.656-662 crossref(new window)
1.
A Study on the Mechanical Property of Sillicon Diamond-like-carbon Coating for Insulation of Electrically Assisted Forming Die Component, Transactions of the Korean Society of Automotive Engineers, 2015, 23, 6, 656  crossref(new windwow)
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