JOURNAL BROWSE
Search
Advanced SearchSearch Tips
Effect of Copper Content on the Microstructural Properties of Mo-Cu-N Films
facebook(new window)  Pirnt(new window) E-mail(new window) Excel Download
 Title & Authors
Effect of Copper Content on the Microstructural Properties of Mo-Cu-N Films
Shin, Jung-Ho; Choi, Kwang-Soo; Wang, Qi-Min; Kim, Kwang-Ho;
  PDF(new window)
 Abstract
Ternary Mo-Cu-N films were deposited on Si wafer substrates with various copper contents by magnetron sputtering method using Mo target and Cu target in gaseous atmosphere. As increasing pressure, the microstructure of Mo-N films changed from of (111) having face-centered-cubic (FCC) structure to -MoN of (200) having hexagonal structure. Detailed the microstructures of the Mo-Cu-N coatings were studied by X-ray diffraction, scanning electron microscopy and field emission transmission electron microscope. The results indicated that the incorporation of copper into the growing Mo-N coating led to the and MoN crystallites were more well-distributed and refined and the copper existed in grain boundary. Ternary Mo-Cu-N films had a composite microstructure of the nanosized crystal crystalline and -MoN surrounded by amorphous phase.
 Keywords
Mo-Cu-N film;Physical vapor deposition;X-ray photoelectron spectroscopy;Microstructure;
 Language
Korean
 Cited by
 References
1.
K. H. Kim, D. S. Han, S. K. Kim, Surf. Coat. Technol., 163-164 (2003) 605. crossref(new window)

2.
S. Boelens, H. Veltrop, Surf. Coat. Technol., 33 (1987) 63. crossref(new window)

3.
P. Hones, R. Sanjines, F. Levy, Thin Solid Films, 332 (1998) 240. crossref(new window)

4.
K. H. Lee, C. H. Park, T. S. Yoon, J. J. Lee, Thin Solid Films, 385 (2001) 167. crossref(new window)

5.
M. K. Kazmanli, M. Urgen, A. F. Cakir, Surf. Coat. Technol., 167 (2003) 77. crossref(new window)

6.
T. Suszko,W. Gulbi ski, J. Jagielski, Surf. Coat. Technol., 194 (2005) 319.

7.
S. F. Murray, S. J. Calabrese, Lubr. Eng., 49 (1992) 955.

8.
I.-W. Lyo, H.-S. Ahn, D.-S. Lim, Surf. Coat. Technol., 163-164 (2003) 413. crossref(new window)

9.
J. Suna, J. Musil, P. Dohnal, Vacuum, 80 (2006) 588. crossref(new window)

10.
S. J. Heo, K. H. Kim, M. C. Kang, J. H. Suh, C. G. Park, Surf. Coat. Technol., 201 (2006) 4180. crossref(new window)

11.
H. S. Myung, H. M. Lee, L. R. Shaginyanb, J. G. Han, Surf Coat Technol., 163-164 (2003) 591. crossref(new window)

12.
T. Arcos, P. Oelhafen, U. Aebi, A. Hefti, M. Duggelin, D. Mathys, R. Guggenheim, Vacuum, 67 (2002) 463. crossref(new window)

13.
M. A. Baker, P. J. Kench, M. C. Joseph, C. Tsotsos, A. Leyland, A. Matthews, Surf Coat Technol., 162 (2003) 222. crossref(new window)

14.
C. P. Mulligan, T. A. Blanchet, D. Surf Coat Technol., 204 (2010) 1388. crossref(new window)

15.
J. Musil, P. Zeman, H. Hruby, P. H. Mayrhofer, Surf Coat Technol., 120-121 (1999) 179. crossref(new window)

16.
P. Zeman, R. Cerstv , P. H. Mayrhofer, C. Mitterer, J. Musil, Mater. Sci. Eng. A., 289 (2000) 189. crossref(new window)

17.
X. Sun, J. S. Reid, E. Lolawa, M. A. Nicolet, J. Appl. Phys., 81(2) (1997) 656. crossref(new window)

18.
S. Veprek, Surf. Coat. Technol., 97 (1997) 15. crossref(new window)

19.
K. H. Kim, S. R. Choi, S. Y. Yoon, Surf. Coat. Technol., 298 (2002) 243.

20.
A. Ozturk, K. V. Ezirmik, K. Kazmanl , M. Urgen, O. L. Ery lmaz, A. Erdemir, Tribol. Int., 41 (2008) 49. crossref(new window)

21.
A. Erdemir, Tribol. Lett., 8 (2000) 97. crossref(new window)

22.
JCPDS, X-ray Index Cards, 25-1366.

23.
S. Y. Yoon, S. R. Choi, M. H. Lee, K. H. Kim, J. Kor. Inst. Surf. Eng., 36 (2003) 122.

24.
C. D. Wagner, A. V. Naumkin, A. Kraut-Vass, J. W. Allison, C. J. Powell, J. R. Rumble. NIST X-ray Photoelectron Spectroscopy Database, NIST Standard Reference Database 20, Version 3.5.

25.
G. Soto, J. A. Daz, W. de la Cruz, Mater. Lett., 57 (2003) 4130.

26.
C. Gallardo-Vega, W. de la Cruz, Appl. Surf. Sci., 252 (2006) 8001. crossref(new window)

27.
J. W. Lee, Y. C. Kuo, Y. C. Chang, Surf Coat Technol., 201 (2006) 4078. crossref(new window)

28.
P. Zeman, R. Cerstv , P. H. Mayrhofer, C. Mitterer, J. Musil. Mater. Sci. Eng. A. 289 (2000) 189. crossref(new window)