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Study of Temperature Uniformity Improvement of Inductive Heating in MOCVD Systems to Deposit White LED
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 Title & Authors
Study of Temperature Uniformity Improvement of Inductive Heating in MOCVD Systems to Deposit White LED
Hong, Kwang-Ki; Yang, Won-Kyun; Joo, Jung-Hoon; Lee, Seung-Ho; Lee, Tae-Wan;
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 Abstract
Deposition temperature uniformity of GaN based MQW (multiple quantum well) layers is an important key which affects the wavelength uniformity of white LEDs. Temperature uniformity was assessed by infrared images for both cases of a static and a rotating susceptor. Rotating the susceptor at 2.5 rpm over the induction heater gave 4.3% of temperature non-uniformity. Temperature distribution of the graphite susceptor over the induction heater was numerically modelled and agreed with experimental results.
 Keywords
Induction heating;Substrate temperature uniformity;Substrate rotating;CFD-ACE+;Numerical modeling;
 Language
Korean
 Cited by
1.
Numerical Modeling for GaN Deposition by MOCVD: Effects of the Gas Inlet,;;

Applied Science and Convergence Technology, 2014. vol.23. 3, pp.139-144 crossref(new window)
1.
Numerical Modeling for GaN Deposition by MOCVD: Effects of the Gas Inlet, Applied Science and Convergence Technology, 2014, 23, 3, 139  crossref(new windwow)
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