Publisher : The Korean Institute of Surface Engineering
DOI : 10.5695/JKISE.2010.43.6.304
Title & Authors
Study of Temperature Uniformity Improvement of Inductive Heating in MOCVD Systems to Deposit White LED Hong, Kwang-Ki; Yang, Won-Kyun; Joo, Jung-Hoon; Lee, Seung-Ho; Lee, Tae-Wan;
Deposition temperature uniformity of GaN based MQW (multiple quantum well) layers is an important key which affects the wavelength uniformity of white LEDs. Temperature uniformity was assessed by infrared images for both cases of a static and a rotating susceptor. Rotating the susceptor at 2.5 rpm over the induction heater gave 4.3% of temperature non-uniformity. Temperature distribution of the graphite susceptor over the induction heater was numerically modelled and agreed with experimental results.
Induction heating;Substrate temperature uniformity;Substrate rotating;CFD-ACE+;Numerical modeling;