JOURNAL BROWSE
Search
Advanced SearchSearch Tips
Nanocrystalline Diamond Coating on Steel with SiC Interlayer
facebook(new window)  Pirnt(new window) E-mail(new window) Excel Download
 Title & Authors
Nanocrystalline Diamond Coating on Steel with SiC Interlayer
Myung, Jae-Woo; Kang, Chan Hyoung;
  PDF(new window)
 Abstract
Nanocrystalline diamond(NCD) films on steel(SKH51) has been investigated using SiC interlayer film. SiC was deposited on SKH51 or Si wafer by RF magnetron sputter. NCD was deposited on SiC at for 0.5~4 h employing microwave plasma CVD. Film morphology was observed by FESEM and FIB. Film adherence was examined by Rockwell C adhesion test. The growth rate of NCD on SiC/Si substrate was much higher than that on SiC/SKH51. During particle coalescence, NCD growth rate was slow since overall rate was determined by the diffusion of carbon on SiC surface. After completion of particle coalescence, NCD growth became faster with the reaction of carbon on NCD film controlling the whole process. In the case of SiC/SKH51 substrate, a complete NCD film was not formed even after 4 h of deposition. The adhesion test of NCD/SiC/SKH51 samples revealed a delamination of film whereas that of SiC/SKH51 showed a good adhesion. Many voids of less than 0.1 were detected on NCD/SiC interface. These voids were believed as the reason for the poor adhesion between NCD and SiC films. The origin of voids was due to the insufficient coalescence of diamond particles on SiC surface in the early stage of deposition.
 Keywords
Nanocrystalline diamond;Microwave plasma CVD;Silicon carbide;Adhesion;
 Language
Korean
 Cited by
1.
나노결정질 다이아몬드가 코팅된 SiC 마모시험기 볼,임종환;강찬형;

한국표면공학회지, 2014. vol.47. 5, pp.263-268 crossref(new window)
2.
CVD 다이아몬드가 코팅된 알루미늄 방열판의 방열 특성,윤민영;임종환;강찬형;

한국표면공학회지, 2015. vol.48. 6, pp.297-302 crossref(new window)
1.
Nanocrystalline Diamond Coated SiC Balls in Tribometer, Journal of the Korean institute of surface engineering, 2014, 47, 5, 263  crossref(new windwow)
2.
Heat Spreading Properties of CVD Diamond Coated Al Heat Sink, Journal of the Korean institute of surface engineering, 2015, 48, 6, 297  crossref(new windwow)
 References
1.
D. M. Gruen, Annu. Rev. Mater. Sci., 29 (1999) 211. crossref(new window)

2.
J. E. Butler, A. V. Sumant, Chem. Vap. Deposition, 14 (2008) 145. crossref(new window)

3.
V. G. Ralchenko, A. A. Smolin, V. G. Pereverzev, E. D. Obraztsova, K. G. Korotoushenko, V. I. Konov, Y. V. Lakhotkin, E. N. Loubnin, Diamond Relat. Mater., 4 (1995) 754. crossref(new window)

4.
Q. H. Fan, A. Fernandes, J. Gracio, Diamond Relat. Mater., 7 (1998) 603. crossref(new window)

5.
Y. S. Li, Y. Tang, Q. Yang, J. Maley, R. Sammynaiken, T. Regier, C. Xiao, A. Hirose, Appl. Mater. Interf., 2 (2010) 335. crossref(new window)

6.
R. Polini, Thin Solid Films, 515 (2006) 4. crossref(new window)

7.
X. Xiao, B. W. Sheldon, E. Konca, L. C. Lev, M. J. Lukitsch, Diamond Relat. Mater., 18 (2009) 1114. crossref(new window)

8.
R. Polini, M. Barletta, G. Cristofallini, Thin Solid Films, 519 (2010) 1629. crossref(new window)

9.
Y. Tang, Y. S. Li, Q. Yang, A. Hirose, Diamond Relat. Mater., 19 (2010) 496. crossref(new window)

10.
B.-K. Na, C. H. Kang, J. Kor. Inst. Surf. Eng., 46 (2013) 68. crossref(new window)

11.
D.-B. Park, J.-W. Myung, B.-K. Na, C. H. Kang, J. Kor. Inst. Surf. Eng., 46 (2013) 145. crossref(new window)

12.
D. Y. Jung, C. H. Kang, J. Kor. Inst. Surf. Eng., 44 (2011) 131. crossref(new window)

13.
I.-S. Kim, C. H. Kang, J. Kor. Inst. Surf. Eng., 46 (2013) 29. crossref(new window)