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Mechanical Properties of TiAlSiN films Coated by Hybrid Process
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 Title & Authors
Mechanical Properties of TiAlSiN films Coated by Hybrid Process
Song, Min-A; Yang, Ji-Hoon; Jung, Jae-Hun; Kim, Sung-Hwan; Jeong, Jae-In;
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In this study, TiAlSiN coatings have been successfully synthesized on stainless steel and tungsten carbide substrate by a hybrid coating method employing a cathodic arc and a magnetron sputtering source. TiAl and Si target were vaporized with the cathodic arc source and the magnetron sputtering source, respectively. Process gas was the mixture of nitrogen and argon gas. With the increase of Si content, the crystallinity and the grain size of TiAlSiN film was decreased. At the Si content of more than 8 at.%, grain size of TiAlSiN was saturated at around 2 nm. The hardness value of the TiAlSiN film increased with incorporation of Si, and had the maximum value of ~ 3,233 Hv at the Si content of 9.2 at.%. The oxidation resistance of TiAlSiN film was enhanced with the increase of Si content.
Magnetron Sputtering;Cathodic Arc Deposition;TiAlSiN Coating;Hybrid Process;Oxidation Resistance;
 Cited by
음극 아크 증착으로 제조된 AlTiN 박막의 특성,양지훈;김성환;송민아;정재훈;정재인;

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