JOURNAL BROWSE
Search
Advanced SearchSearch Tips
Electrical and Optical Properties of Amorphous ITZO Deposited at Room Temperature by RF Magnetron Sputtering
facebook(new window)  Pirnt(new window) E-mail(new window) Excel Download
 Title & Authors
Electrical and Optical Properties of Amorphous ITZO Deposited at Room Temperature by RF Magnetron Sputtering
Lee, Ki Chang; Jo, Kwang-Min; Lee, Joon-Hyung; Kim, Jeong-Joo; Heo, Young-Woo;
  PDF(new window)
 Abstract
The electrical and optical properties of amorphous In-Tin-Zinc-Oxide(ITZO) deposited at room temperature using rf-magnetron sputtering were investigated. The amorphous ITZO thin films were obtained at the composition of In:Sn:Zn
 Keywords
ITZO;RF Magnetron sputtering;Oxide TFT;transparent conductive oxide;
 Language
Korean
 Cited by
1.
RF 마그네트론 스퍼터링 법으로 제작한 ITZO 박막의 구조 및 광학적 특성,김동렬;배지환;황동현;손영국;

한국표면공학회지, 2015. vol.48. 6, pp.292-296 crossref(new window)
1.
Structural and Optical Properties of ITZO Deposited by RF Magnetron Sputtering, Journal of the Korean institute of surface engineering, 2015, 48, 6, 292  crossref(new windwow)
2.
Study of Dry Etching of SnO thin films using a Inductively Coupled Plasma, Journal of the Korean institute of surface engineering, 2016, 49, 1, 98  crossref(new windwow)
 References
1.
K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, H. Hosono, Nature, 432 (2004) 488. crossref(new window)

2.
T. Kamiya, K. Nomura, H. Hosono, Sci. Technol. Adv. Mater., 11 (2010) 044305. crossref(new window)

3.
K. Ebata, S. Tomai, Y. Tsuruma, T. Iitsuka, S. Matsuzaki K. Yano, Appl. Phys Express, 5 (2012) 011102. crossref(new window)

4.
J. S. Seo, B. S. Bae, ACS Appl. Mater. Interfaces, 6(17) (2014) 15335.

5.
D. P. Heineck, B. R. McFarlane, J. F. Wager, IEEE Electron Device Lett, 30 (2009) 514. crossref(new window)

6.
K. C. Lee, K. M. Jo, S. Y. Sung, J. H. Lee, J. J. Kim, B. S. Jeong, S. J. Pearton, D. P. Norton Y. W. Heo, J. Vac. Sci. Technol., B, 29 (2011) 021008.

7.
S. Y. Sung, J. H. Choi, U. B. Han, K. C. Lee, J. H. Lee, J. J. Kim, W. Lim, S. J. Pearton, D. P. Norton Y. W. Heo, Appl. Phys. Lett., 96 (2010) 102107. crossref(new window)

8.
Y. H. Kim, J. S. Heo, T. H. Kim, S. Park, M. H. Yoon, J. Kim, M. S. Oh, G. R. Yi, Y. Y. Noh, S. K. Park, Nature, 489 (2012) 128. crossref(new window)

9.
T. D. Jung, P. K. Song, J. Kor. Inst. Surf. Eng., 45 (2012) 242. crossref(new window)

10.
L. Raniero, I. Feffeira, A. Pimentel, A.Goncalves, P. Canhola, E. Fortunato, R. Martins, Thin Solid Films, 511-512 (2006) 295. crossref(new window)

11.
C. A. Hoel, T. O. Mason, J. F. Gaillard, K. R. Peoppelmeier, Chem., Mater. 22 (2010) 3569. crossref(new window)

12.
T. Kamiya, K. Nomura, H. Hosono, J. Disp. Technol., 5 (2009) 237.

13.
H. Q. Chiang, D. Hong, C. M. Hung, R. E. Presley, J. F. Wager, C. H. Park, D. A. Keszler, G. S. Herman, J. Vac. Sci. Techol. B, 24 (2006) 2702. crossref(new window)

14.
K. Nomura, A. Takagi, T. Kamiya, H. Ohta, M. Mirano, H. Hosono, Jpn. J. Appl. Phys., 45 (2006) 4303. crossref(new window)