JOURNAL BROWSE
Search
Advanced SearchSearch Tips
Electrical Properties of ITO Thin Film Deposited by Reactive DC Magnetron Sputtering using Various Sn Concentration Target
facebook(new window)  Pirnt(new window) E-mail(new window) Excel Download
 Title & Authors
Electrical Properties of ITO Thin Film Deposited by Reactive DC Magnetron Sputtering using Various Sn Concentration Target
Kim, Min-Je; Jung, Jae-Heon; Song, Pung-Keun;
  PDF(new window)
 Abstract
Indium tin oxide (ITO) thin films (30 nm) were deposited on PET substrate by reactive DC magnetron sputtering using In/Sn(2, 5 wt.%) metal alloy target without intentionally substrate heating during the deposition under different DC powers of 70 ~ 110 W. The electrical properties were estimated by Hall-effect measurements system. The resistivity of ITO thin film deposited using In/Sn (5 wt.%) metal alloy target at low DC power increased with increasing annealing time. However, they increased with increasing annealing time at high DC power. In the case of ITO (Sn 2 wt%), we can't find clear change in resistivity with increasing annealing time. However, carrier density and mobility showed difference behavior due to change of oxygen vacancy.
 Keywords
ITO;Reactive DC sputtering;Thin film;Post annealing;
 Language
Korean
 Cited by
 References
1.
Y. S. Park, S.H. Lee, P.K. Song, J. Kor. Inst. Sur. Eng., 40 (2007), 107. crossref(new window)

2.
J.H. Jung, S. H. Cho, P. K. Song, J. Kor. Inst. Sur. Eng., 46 (2013) 16. crossref(new window)

3.
J. H. Kim, C. G. Kang, Y. T. Kim, W. S. Cheong, P. K. Song, J. Nanosci. Nanotechnol, 13 (2012) 1.

4.
S. Honda, M. Watamori, K. Oura, Thin Soild Films, 281 (1996) 206.

5.
C. MENG, B. Xuedong, G. Jun, S. Chao, H. Rongfang, W. Lishi, J. Mater. Sci. Technol., 16 (2000) 281.

6.
S. W. Kang, H. J. Lee, S. H. Cho, W. S. Cheong, G. H. Lee, P. K. Song, J. Nanoelectron. Optoelectron., 7 (2012) 494. crossref(new window)

7.
S. W. Kang, S. H. Cho, W. S. Cheong, G. H. Lee, P. K. Song, J. Nanoelectron. Optoelectron., 9 (2014) 1. crossref(new window)

8.
A. S. A. C Diniz, Renewable Energy., 36 (2011) 1153. crossref(new window)

9.
N. Oka, Y. Kawase, Y. Shigesato, Thin Solid Films., 520 (2012) 4101. crossref(new window)