Publisher : The Korean Institute of Surface Engineering
DOI : 10.5695/JKISE.2014.47.6.362
Title & Authors
Design and Fabrication of Dual Tip Si3N4 Probe for Dip-pen Nanolithograpy Kim, Kyung Ho; Han, Yoonsoo;
We report the design, fabrication of a probe and calculation of its mechanical properties for DPN(dip pen nanolithography), which consists of dual tips. Concept of dual tip probe is to employ individual tips on probe as either an AFM tip for imaging or a writing tip for nano patterning. For this, the dual tip probe is fabricated using low residual stress material with LPCVD deposition and MEMS fabrication process. On the basis of FEM analysis we show that the functionality of dual tip probe for imaging is dependent on the dimensions of dual tip probe, and high ratio of widths of beam areas is preferred to minimize curvature variation on probe.
Dual tip probe;Mechanical properties;Nanopatterning;