Publisher : The Korean Institute of Surface Engineering
DOI : 10.5695/JKISE.2015.48.5.233
Title & Authors
A Study on the Potassium Gettering in Al-1%Si/SiO2/PSG Multilevel Thin Films Kim, Jin Young;
In order to investigate the potassium (K) gettering, Al-1%Si//PSG multilevel thin films were fabricated. Al-1%Si thin films and /PSG passivations were deposited by using DC magnetron sputter techniques and APCVD (atmosphere pressure chemical vapor deposition), respectively. Heat treatment was carried out at for 5 h in air. SIMS (secondary ion mass spectrometry) depth profiling analysis was used to determine the distribution of K, Al, Si, P, and other elements throughout the /PSG passivated Al-1%Si thin film interconnections. Potassium peaks were observed throughout the /PSG passivation layers, and especially the interface gettering at the /PSG and at the Al-1%Si/ interfaces was observed. Potassium gettering in Al-1%Si//PSG multilevel thin films is considered to be caused by a segregation type of gettering.