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Structural and Optical Properties of ITZO Deposited by RF Magnetron Sputtering
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 Title & Authors
Structural and Optical Properties of ITZO Deposited by RF Magnetron Sputtering
Kim, Dong Ryeol; Bae, Ji Hwan; Hwang, Dong Hyun; Son, Young Guk;
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Indium tin zinc oxide (ITZO) thin films were deposited on glass and quartz substrates by RF magnetron sputtering. The substrate temperature varied from to . The structural and optical properties of thin films were investigated by X-ray diffraction (XRD), Field Emission Scanning electron microscopy (FESEM) and UV-Visible transmission spectra. It has been found from X-ray diffraction patterns that increasing the substrate temperature, the amorphous structure changes into polycrystalline structure. The FESEM results showed that all ITZO thin films have a smooth surface. The average optical transmittance (400 - 800 nm) was 82% and 80% at all films deposited at . The band gap energy ranges 3.41 to 3.57eV and 2.81 to 3.44eV with a maximum value at all substrates temperature.
ITZO;transmittance;RF Magnetron sputtering;thin film;
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