Publisher : The Korean Institute of Surface Engineering
DOI : 10.5695/JKISE.2016.49.3.252
Title & Authors
Adhesion Change of AZO/PET Film by ZrCu Insertion Layer Ko, Sang-Won; Jung, Jong-Gook; Park, Kyeong-Soon; Lim, Sil-Mook;
In order to form an aluminum-doped zinc oxide (AZO) transparent electrode film on a polyethylene terephthalate (PET) substrate used for a flexible display substrate, the AZO transparent electrode was produced at low temperature without substrate heating. Even though the produced electrode showed characteristic optical transmittance of 90 % (at 550 nm) and sheet resistance within , cracks occurred 10 minutes after loading applied 2 mm radius of curvature, and the sheet resistance increased linearly. An insertion layer of ZrCu was formed between the AZO film and the PET substrate to suppress the generation of cracks on the AZO film. It was verified that the crack was not generated 30 minutes after the loading of 2 mm radius of curvature, and no increase in sheet resistance was recorded. There was also not cracks in the dynamic bending test of 4 mm radius, but surface resistance was slightly increased. As a result, the ZrCu insertion film improved the interfacial adhesion between the substrate and AZO film layer without increasing sheet resistance and decreasing transmittance.
J. van den Brand, J. de Baets, T. Van Mol, and A. Dietzel, Systems-in-foil - Devices, fabrication processes and reliability issues, Microelectron. Reliab., 48 (2008) 1123-1128.
L. Li, H. L. Liu, L. Zou, W. Y. Ding, D. Y. Ju, and W. P. Chai, The effect of oxygen ion beam bombardment on the properties of tin indium oxide/ polyethylene terephthalate complex, Thin Solid Films, 545 (2013) 365-370.
D. Y. Lee, J. R. Lee, G. H. Lee, and P.K. Song, Study on In-Zn-Sn-O and In-Sn-Zn-O films deposited on PET substrate by magnetron cosputtering system, Surf. Coat. Technol., 202 (2008) 5718-5723.
Y. S. Kim, W. J. Hwang, K. T. Eun, and S. H. Choa, Mechanical reliability of transparent conducting IZTO film electrodes for flexible panel displays, Appl. Surf. Sci., 257 (2011) 8134-8138.
Y. S. Kim, S. I. Oh, and S. H. Choa, Mechanical Integrity of Flexible In-Zn-Sn-O Film for Flexible Transparent Electrode, Jpn. J. Appl. Phys., 52 (2013) 05DA17.
Z. N. Yu, L. Xiang, W. Xue, and H. Wang, The bending properties of flexible ITO films, Optical Fiber Communication and Optoelectronics Conference, IEEE, Shanghai, China, (2007) 148-150.
F. Xia, Z. N. Yu, Y. Q. Li, and Z. W. Zhao, The effects of Ti02 buffer layer on the properties of flexible ITO thin films, Optical Fiber Communication & Optoelectronic Exposition & Conference, IEEE, Shanghai, China, (2008) 1-3.
Z. N. Yu, J. J. Zhao, F. Xia, Z. J. Lin, D. P. Zhang, J. Leng, and W. Xue, Enhanced electrical stability of flexible indium tin oxide films prepared on stripe SiO2 buffer layer-coated polymer substrates by magnetron sputtering, Appl. Surf. Sci., 257 (2011) 4807-4810.
S. H. Choa, C. K. Cho, W. J. Hwang, K. T. Eun, and H. K. Kim, Mechanical integrity of flexible InZnO/Ag/InZnO multi layer electrodes grown by continuous roll-to-roll sputtering, Sol. Energ. Mat. Sol., 95 (2011) 3442-3449.
B. J. Kim, H. A. S. Shin, I. S. Choi, and Y. C. Joo, Electrical Failure and Damage Analysis of Multi-layer Metal Films on Flexible Substrate during Cyclic Bending Deformation, Physical and Failure Analysis of Integrated Circuits (IPFA), 2011 18th IEEE International Symposium, IEEE, Incheon, Korea, (2011) 1-4.
J. L. Wu, Y. C. Chen, H. Y. Lin, S. Y. Chu, C. C. Chang, C. J. Wu and Y.D. Juang, Effect of ZnO Buffer Layer on the Bending Durability of ZnO:Ga Films Grown on Flexible Substrates: Investigation of Surface Energy, Electrical, Optical, and Structural Properties, IEEE Trans. Electron., 60 (2013) 2324-2330.
H. K. Lin, S. M. Chiu, T. P. Cho, and J. C. Huang, Improved bending fatigue behavior of flexible PET/ITO film with thin metallic glass interlayer, Mater. Lett., 113 (2013) 182-185.
Y. S. Kim, J. H. Park, D. H. Choi, H. S. Jang, J. H. Lee, H. J. Park, J. I. Choi, D. H. Ju, J. Y. Lee, and D. I. Kim, ITO/Au/ITO multi layer thin films for transparent conducting electrode applications, Appl. Surf. Sci., 254 (2007) 1524-1527.
G. P. Crawford, Flexible Flat Panel Displays, second Ed, Wiley, U.K. (2005) 80-81.