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Correlation Analysis on Semiconductor Process Variables Using CCA(Canonical Correlation Analysis) : Focusing on the Relationship between the Voltage Variables and Fail Bit Counts through the Wafer Process
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 Title & Authors
Correlation Analysis on Semiconductor Process Variables Using CCA(Canonical Correlation Analysis) : Focusing on the Relationship between the Voltage Variables and Fail Bit Counts through the Wafer Process
Kim, Seung Min; Baek, Jun-Geol;
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 Abstract
Semiconductor manufacturing industry is a high density integration industry because it generates a vest number of data that takes about 300~400 processes that is supervised by numerous production parameters. It is asked of engineers to understand the correlation between different stages of the manufacturing process which is crucial in reducing production costs. With complex manufacturing processes, and defect processing time being the main cause. In the past, it was possible to grasp the corelation among manufacturing process stages through the engineer's domain knowledge. However, It is impossible to understand the corelation among manufacturing processes nowadays due to high density integration in current semiconductor manufacturing. in this paper we propose a canonical correlation analysis (CCA) using both wafer test voltage variables and fail bit counts variables. using the method we suggested, we can increase the semiconductor yield which is the result of the package test.
 Keywords
Fail bit;Voltage;Wafer test process;Canonical Correlation Analysis, CCA;
 Language
Korean
 Cited by
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