R. C. M. B. M. Schaepkens, T. E. F. M. Standaert, G. S. Oehrleinb, and J. M. Cook, "Influence of Reactor Wall Conditions on Etch Processes in Inductuvely Coupled Fluorocarbon Plasmas," J. Vac. Sci. Technol. A, 16  2099-107 (1998).
N. Ito, T. Moriya, F. Uesugi, M. Matsumoto, S. Liu, and Y. Kitayama, "Reduction of Particle Contamination in Plasma-Etching Equipment by Dehydration of Chamber Wall," Jpn. J. Appl. Phys. Part1, 47  3630-34 (2008).
S.-M Lee, Y.-S. Oh, and D.-M. Kim, "Plasma Resistance and Erosion Mechanism of Engineering Ceramics," Ceramist, 15  47-55 (2012).
J. Iwasawa, R. Nishimizu, M. Tokita, M. Kiyohara, and K. Uematsu, "Plasma-Resistant Dense Yttrium Oxide Film Prepared by Aerosol Deposition Process," J. Am. Ceram. Soc., 90  2327-32 (2007).
H. Choi, K. Kim, H. Choi, S. Kang, J. Yun, Y. Shin, and T. Kim, "Plasma Resistant Aluminum Oxide Coatings for Semiconductor Processing Apparatus by Atmospheric Aerosol Spray Method," Surf. Coat. Technol., 205 S125-28 (2010).
K.-B. Kim, D.-M. Kim, J.-K. Lee, Y.-S. Oh, H.-T. Kim, H.-S. Kim, and S.-M. Lee, "Erosion Behavior of YAG Ceramics under Fluorine Plasma and Their XPS Analysis," J. Korean Ceram. Soc., 46  456-61 (2009).
D.-M. Kim, S.-H. Lee, W. B. Alexander, K.-B. Kim, Y.-S. Oh, and S.-M. Lee, "X-Ray Photoelectron Spectroscopy Study on the Interaction of Yttrium-Aluminum Oxide with Fluorine-Based Plasma," J. Am. Ceram. Soc., 94  3455-59 (2011).
D.-M. Kim, Y.-S. Oh, S. Kim, H.-T. Kim, D.-S. Lim, and S.-M. Lee, "The Erosion Behaviors of $Y_2O_3$
Coatings under Fluorocarbon Plasma," Thin Solid Films, 519  6698-702 (2011).
J. A. G. B. A. J. V. Roosmalen and S. J. H. Brader, "Dry Etching for VLSI," pp.39-69, Plenum Press, New York and London, 1991.
Y. Kobayashi, "Current Status and Needs in the Future of Ceramics Used for Semiconductor Production Equipment (in Japanese)," Proceeding of the 37th Seminar on Hightemperature Ceramics, Ceram. Soc. Jpn., (2005).
H. Kassner, R. Siegert, D. Hathiramani, R. Vassen, and D. Stoever, "Application of Suspension Plasma Spraying (SPS) for Manufacture of Ceramic Coatings," J. Therm. Spray Technol., 17  115-23 (2007).
K. VanEvery, M. J. M. Krane, R. W. Trice, H. Wang, W. Porter, M. Besser, D. Sordelet, J. Ilavsky, and J. Almer, "Column Formation in Suspension Plasma-Sprayed Coatings and Resultant Thermal Properties," J. Therm. Spray Technol., 20  817-28 (2011).
S. Gong, K. VanEvery, H. Wang, and R. W. Trice, "Microstructure and Thermal Properties of Inflight Rare-Earth Doped Thermal Barriers Prepared by Suspension Plasma Spray," J. Eur. Ceram. Soc., 34  1243-53 (2014).
X. Qin, G. Zhou, H. Yang, J. I. Wong, J. Zhang, D. Luo, S. Wang, J. Ma, and D. Tang, "Fabrication and Plasma Resistance Properties of Transparent YAG Ceramics," Ceram. Int., 38  2529-935 (2012).
C. Delbos, J. Fazilleau, V. Rat, J. F. Coudert, P. Fauchais, and B. Pateyron, "Phenomena Involved in Suspension Plasma Spraying Part 2: Zirconia Particle Treatment and Coating Formation," Plasma Chem. Plasma. P., 26  393-414 (2006).
L. Latka, S. B. Goryachev, S. Kozerski, and L. Pawlowski, "Sintering of Fine Particles in Suspension Plasma Sprayed Coatings," Materials, 3  3845-66 (2010).
B. Guo, A. Harvey, S. H. Risbud, and I. M. Kennedy, "The Formation of Cubic and Monoclinic $Y_2O_3$ Nanoparticles in a Gas-Phase Flame Process," Phil. Mag. Lett., 86  457-67 (2006).
H. M. J. Kitamura, K. Sato, Gifu, Z. Tang, and A. Burgess, "Crystal and Micro Structures of Plasma Sprayed Yttrium Oxide Coatings by Axial Injection of Fine Powder Slurries," Proceedings of the International Thermal Spray Conference, 567-72 (2010).
J. W. Singh and D. E. Wolfe, "Review Nano and Macrostructured Component Fabrication by Electron Beam-Physical Vapor Deposition (EB-PVD)," J. Mater. Sci-Mater. M., 20  677-95 (2005).
D.-M. Kim, S.-Y. Yoon, K.-B. Kim, H.-S. Kim, Y.-S. Oh, and S.-M. Lee, "Plasma Resistances of Yttria Deposited by EBPVD Method," J. Korean Ceram. Soc., 45  707-12 (2008).
I. A. Behera and S. C. Mishra, "Dependence of Adhesion Strength of Plasma Spray on Coating Surface Properties," Mater. Metall. Eng., 2  23-30 (2012).
R. Vert, D. Chicot, C. Dublanche-Tixier, E. Meillot, A. Vardelle, and G. Mariaux, "Adhesion of YSZ Suspension Plasma-sprayed Coating on Smooth and Thin Substrates," Surf. Coat. Technol., 205  999-1003 (2010).
P. Fauchais, R. Etchart-Salas, V. Rat, J. F. Coudert, N. Caron, and K. Wittnann-Teneze, "Parameters Controlling Liquid Plasma Spraying: Solutions, Sols, or Suspension," J. Therm. Spray Technol., 17  31-59 (2008).
X. Chen and E. Pfender, "Effect of the Knudsen Number on Heat Transfer to a Particle Immersed into a Thermal Plasma," Plasma Chem. Pasma P. 3  97-113 (1983).
P. Fauchasis and A. Vardelle, "Solution and Suspension Plasma Spraying of Nanostructure Coatings," Advanced Plasma Spray Applications, pp.149-188, In Tech, 2012.