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Dynamical behaviour of electrically actuated microcantilevers
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  • Journal title : Coupled systems mechanics
  • Volume 4, Issue 3,  2015, pp.251-262
  • Publisher : Techno-Press
  • DOI : 10.12989/csm.2015.4.3.251
 Title & Authors
Dynamical behaviour of electrically actuated microcantilevers
Farokhi, Hamed; Ghayesh, Mergen H.;
The current paper aims at investigating the nonlinear dynamical behaviour of an electrically actuated microcantilever. The microcantilever is excited by a combination of AC and DC voltages. The nonlinear equation of motion of the microcantilever is obtained by means of force and moment balances. A high-dimensional Galerkin scheme is then applied to reduce the equation of motion to a discrete model. A numerical technique, based on the pseudo-arclength continuation method, is used to solve the discretized model. The electrostatic deflection of the microcantilever and static pull-in instabilities, due to the DC voltage, are analyzed by plotting the so-called DC voltage-deflection curves. At the simultaneous presence of the DC and AC voltages, the nonlinear dynamical behaviour of the microcantilever is analyzed by plotting frequency-response and force-response curves.
microcantilevers;electrically actuated;pull-in instability;dynamical behaviour;
 Cited by
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