Analysis of Linear-type Ultrasonic Motor Using A Finite Element Method

유한요소해석 프로그램에 의한 리니어 초음파 모터의 변위량 해석

  • 이동준 (전자부품종합기술연구소) ;
  • 임태빈 (전자부품종합기술연구소) ;
  • 강성택 (전자부품종합기술연구소) ;
  • 김영욱 (전자부품종합기술연구소) ;
  • 임기조 (충북대학교 전기공학과)
  • Published : 1998.06.01


This paper is a study on a linear ultrasonic motor with a first longitudinal$(L_1)$ and fourth bending $(B_4)$ double-mode rectangular plate. The stator vibrator is composed of an elastic material plate and of a piezo-ceramic element having a motion by electrical excitation. Each strain vector differs by $90^{\circ}$ generate travelling wave with the elliptical displacement motion of a point on the surface. To magnify displacement of longitudinal direction in elliptical displacement motion, the motor has a mechanism of the.displacement enlargement. In this paper, the vibration shape of the stator is simulated using the finite element method. A detailed model considered of the piezoelectric effect and of the exact geometry of the stator is used to calculate the displacement. The position of displacement mechanism is decided by the maximum displacement.