Micro-EDM is generally used far machining micro 3-D structure. For micro-EDM, first of all, micro-electrode fabrication is needed and WEDG system is proposed for tool electrode fabrication method. When tool electrode is fabricated using WEDG system, its characteristics are under the control of many EDM parameters. Also relations between the parameters affect electrode fabrication. In this study, experiments are carried out to analyze effects of EDM parameters on micro-electrode fabrication. Experimental method and analysis are used to experimental design method. Factors used in experiments are composed of applied voltage, capacitance, wire feed rate, spindle rotating speed, machining time. As a result of experiments, wire feed rate, machining time and capacitance is proportional to gap distance(material removal), the other parameters(applied voltage, spindle rotating speed) and relations between the parameters have little influence on machining.