Micro-EDM is generally used far machining micro holes, pockets, and 3-D structures. For micro-EDM, first of all, micro-electrode fabrication is needed and WEDC system is proposed for tool electrode fabrication method. When tool electrode is fabricated using WEDG system, its characteristics are under the control of many EDM parameters. Also relations between the parameters affect electrode fabrication. In this study, experiments are carried out to analyze effects of EDM parameters about electrode surface integrity on micro-electrode fabrication. Experimental method and analysis are used to experimental design method. Factors used in experiments are composed of capacitance, resistance, pause time, wire feed rate, spindle rotating speed. As a result of experiments, capacitance and resistance affect electrode surface.