A Study on the Secondary Electron Detector for use in Scanning Electron Microscope
SEM용 전자 검출기의 설계 및 제작
The nature of the signals collected by an SEM(Scanning Electron Microscope) in order to form images are all dependent on the detector used to collect them, and the quality of an acquired image is strongly influenced by detector performance. Therefore, the development of detector with high performance is very important in pulling up the resolution of SEM This study presents the secondary electron detector for use in scanning electron microscope, electric circuit and I/V conversion circuit for driving that detector.
- Electron Detector;
- Scanning Electron Microscope;
- Secondary Electron;
- Photomultiplier tube;
- Secondary Electron Detector