A free standing metal structures for MEMS switches

MEMS switch 응용을 위한 free standing 금속 구조물에 관한 연구

  • Hwang, Hyun-Suk (School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Kim, Eung-Kwon (School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Kang, Hyun-Il (School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Lee, Kyu-Il (School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Lee, Tae-Yong (School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Song, Joon-Tae (School of Information and Communication Engineering, Sungkyunkwan University)
  • 황현석 (성균관대학교 정보통신공학부) ;
  • 김응권 (성균관대학교 정보통신공학부) ;
  • 강현일 (성균관대학교 정보통신공학부) ;
  • 이규일 (성균관대학교 정보통신공학부) ;
  • 이태용 (성균관대학교 정보통신공학부) ;
  • 송준태 (성균관대학교 정보통신공학부)
  • Published : 2005.11.10

Abstract

In this paper, big free standing metal structures for electrostatic MEMS switches are easily fabricated using photoresist sacrificial layer. The entire process sequence, through the removal of the sacrificial layer, is kept below 150 $^{\circ}C$ to avoid curing problem of photoresist sacrificial layer. Metal structure is fabricated by thermal evaporator and a self test electrode is fabricated underlying metal suspended structure for testing by electrostatic force. The new wet release process is considered using methanol rinse, general wet release process cause stiction problem by capillary force during drying, and the yield is dramatically improved than previous wet release process using DI water rinse. The fabrication becomes much simpler and cheaper with use of a photoresist sacrificial layer.