In the detection of pathogenic microorganisms ATP-bioluminescence reaction is a fascinating method. ATP(adenosine triphosphate) is an energy source of all kinds of living organism and ATP-bioluminescence reaction uses this ATP. However, ATP exists not only in the cells but also outside the cells. Therefore ATP-bioluminescence reaction only with intracellular ATP is very important in pathogenic microorganism detection. Because of that reason we developed a microfluidic channel containing Dielectrophoretic zone which capture microorganisms and eliminating and washing extracellular ATP with ATP-degarading enzymes, adenosine phosphate deaminase and apyrase. Microorganisms are captured by pDEP force at the DEP electrode zone and only extracellular ATPs are washed and eliminated outside the zone.