All Layer Printed TFT-LCD Device by Large Area UV-Imprinting Lithography

  • Chang, Jae-Hyuk (LCD R & D Center, LCD Business., Samsung Electronics Co., LTD.) ;
  • Lee, Seung-Jun (LCD R & D Center, LCD Business., Samsung Electronics Co., LTD.) ;
  • Park, Dae-Jin (LCD R & D Center, LCD Business., Samsung Electronics Co., LTD.) ;
  • Bae, Joo-Han (LCD R & D Center, LCD Business., Samsung Electronics Co., LTD.) ;
  • Lee, Sung-Hee (LCD R & D Center, LCD Business., Samsung Electronics Co., LTD.) ;
  • Kim, Jang-Kyum (LCD R & D Center, LCD Business., Samsung Electronics Co., LTD.) ;
  • Kim, Kyu-Young (LCD R & D Center, LCD Business., Samsung Electronics Co., LTD.) ;
  • Bae, Jung-Mok (SAIT, Samsung Electronics Co., LTD.) ;
  • Kim, Bo-Sung (LCD R & D Center, LCD Business., Samsung Electronics Co., LTD.) ;
  • Lim, Soon-Kwon (LCD R & D Center, LCD Business., Samsung Electronics Co., LTD.)
  • Published : 2009.10.12

Abstract

Resist patterning of all layers in TFT and BM layer in CF were carried out using UV-imprinting Lithography to make a 12.1 inch TFT-LCD panel at the resolution of 1280 ${\times}$ 800 lines (125 ppi). Technical challenges and solutions for resist patterning by UV-imprinting are shown in this article.