Electrical and Optical Properties of $SnO_2$ Thin Films by Chemical Vapor Deposition

화학증착법에 의한 $SnO_2$ Film의 전기적 및 광학적 성질

  • 김광호 (부산대학교 무기재료공학과) ;
  • 김태옥 (부산대학교 무기재료공학과) ;
  • 천성순 (한국과학기술원 재료공학과)
  • Published : 1986.05.01


$SnO_2$ thin films have been prepared by chemical vapor deposition technique. Electrical and optical properties of the films have been investigated. It is found that the electrical condictivity and optical transparency of the films are most affected by deposition temperature and more affected by $SnCl_4$ partial pressure than by $O_2$ partial pressure. Experimental results show that the conductivity increases with high optical transparency as deposition temperature increases up to 50$0^{\circ}C$ but the conductivity decreases with the loss of transparency as deposition temperature increases above $600^{\circ}C$.



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