The Fabrication of Microlenses by Photoresist Melting Method

Photoresist 용융법을 이용한 미세렌즈 행렬 제작

  • Published : 1994.06.01


Microlens arrays are fabricated by melting "islands" of thick photoresist on a glass substrate. Microlenses with diameters $25\mu\textrm{m}$, $50\mu\textrm{m}$, $100\mu\textrm{m}$are made. Their surface profiles are obtained by a scanning electron microscope and a mechanical surface profilometer. The wavefront of the microlenses is measured by phase-shifting techniques using a Mach-Zehnder-like configuration. Thereby wavefront errors, focal lengths. point spread functions are obtained. The microlens with the diameter of $100\mu\textrm{m}$ has focal length of $164\mu\textrm{m}$ and spot diameter is less than $5\mu\textrm{m}$..