Effect of Laser Shot Number on the Surface Particle Density of $YBa_2Cu_3O_{7-x}$ Thin Films by Pulsed Laser Deposition

펄스레이저 입사수에 따른 $YBa_2Cu_3O_{7-x}$박막의 표면입자밀도 변화

  • 서정대 (한국전자통신연구소 기초기술연구부) ;
  • 성건용 (한국전자통신연구소 기초기술연구부)
  • Published : 1994.03.01


Effect of the laser shot number on the particulates density of the pulsed laser deposited YBa2Cu3O7-x thin films and the laser irradiated surface morphology of the YBa2Cu3O7-x bulk target have been investigated. Until 100 laser shots of cumulative irradiation, the films has the particulates density of ~103 mm-2. However, after 100 laser shots, the density was increased more than 10 times. This results has been explained by the change of particulate ejection path with the development of conical structure at the target surface.



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