Preparation of $PbTiO_3$ Thin Films using Metal Alkoxide and Diethanolamine Complexing Agent

금속알콕사이드와 Diethanolamine 착체를 이용한 $PbTiO_3$ 박막 제조

  • 김승현 (연세대학교 세라믹공학과) ;
  • 한현규 (연세대학교 세라믹공학과) ;
  • 오영제 (한국과학기술연구원 세라믹스연구부) ;
  • 김창은 (연세대학교 세라믹공학과)
  • Published : 1994.05.01


PbTiO3 thin films were prepared by sol-gel spin coating method using metal alkoxide and diethanolamine (DEA). The precipitation of the PbTiO3 sol occurred at pH 7.3 with HNO3 addition, regardless of the amount of DEA. The gelation time of the PbTiO3 sol was reduced with increasing amount of HNO3 and/or water. When the PbTiO3 films prepared by 0.2 molar coating solution were annealed at $650^{\circ}C$ for 30 min, dense and single phase perovskite films were obtained. Dielectric constant and loss tangent of the film were 239 and 0.01 at 1 kHz, respectively.



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