Characterization and Emission/Absorption Study of a Grimm-type Glow discharge source in the application of high frequency Glow Discharge

고주파 글로우 방전을 이용한 GRIMM형 방전원의 특성 및 방출/흡광분석법 연구

  • Received : 1994.03.03
  • Published : 1994.06.25

Abstract

A conventional Grimm-type glow discharge source was constructed and applied to radio-frequency(13.56MHz) discharge for metal and ceramic analysis. We investigated the emission spectrum for aluminium and aluminium oxide and the influence of discharge operating paramaters including argon pressure, rf-power and DC-bias voltages at the sample-side electrode. Scanning Electron Microscope(SEM) also was used to investigate the effect of rf-sputtering on the microstructure formation of the aluminium oxide. Linear analytical calibration curves were constructed for Manganese and zinc element in samples of low alloy steel(BAS 401-405) and brass(NIST 1108-1117).

Keywords

rf-Glow Discharge;Ceramic analysis;Emission spectrometry;Absorption spectrometry