Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Design, Fabricaiton and Testing of a Piezoresistive Cantilever-Beam Microaccelerometer for Automotive Airbag Applications

에어백용 압저항형 외팔보 미소 가속도계의 설계, 제작 및 시험

  • Ko, Jong-Soo (Dept. of Mechanical Engineering, Graduate School of Korea Advanced Institute of Science and Technology) ;
  • Cho, Young-Ho (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kwak, Byung-Man (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Park, Kwan-Hum
  • 고종수 (한국과학기술원 대학원 기계공학과) ;
  • 조영호 (한국과학기술원 기계공학과) ;
  • 곽병만 (한국과학기술원 기계공학과) ;
  • 박관흠 (현대자동차(주) 연구개발부)
  • Published : 1996.02.01

Abstract

A self-diagnostic, air-damped, piezoresitive, cantilever-beam microaccelerometer has been designed, fabricated and tested for applications to automotive electronic airbag systems. A skew-symmetric proof-mass has been designed for self-diagnostic capability and zero transverse sensitivity. Two kinds of multi-step anisotropic etching processes are developed for beam thickness control and fillet-rounding formation, UV-curing paste has been used for sillicon-to-glass bounding. The resonant frequency of 2.07kHz has been measured from the fabricated devices. The sensitivity of 195 $\mu{V}$/g is obtained with a nonlinearity of 4% over $\pm$50g ranges. Flat amplitude response and frequency-proportional phase response have been obserbed, It is shown that the design and fabricaiton methods developed in the present study yield a simple, practical and effective mean for improving the performance, reliability as well as the reproducibility of the accelerometers.

Keywords

Micromachining;Silicon Accelerometer;Air-bag;Cross-Axis Sensitivity;Skew-Symmetric Proof-Mass;Piezoresistive Detection;Self-Diganosis;Air-Damping;Multi-Step Anisotropic Etch;Fillet-Rounding Formation

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References

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