Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)
- Volume 20 Issue 2
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- Pages.408-413
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- 1996
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- 1226-4873(pISSN)
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- 2288-5226(eISSN)
DOI QR Code
Design, Fabricaiton and Testing of a Piezoresistive Cantilever-Beam Microaccelerometer for Automotive Airbag Applications
에어백용 압저항형 외팔보 미소 가속도계의 설계, 제작 및 시험
- Ko, Jong-Soo (Dept. of Mechanical Engineering, Graduate School of Korea Advanced Institute of Science and Technology) ;
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Cho, Young-Ho
(Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
- Kwak, Byung-Man (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
- Park, Kwan-Hum
- Published : 1996.02.01
Abstract
A self-diagnostic, air-damped, piezoresitive, cantilever-beam microaccelerometer has been designed, fabricated and tested for applications to automotive electronic airbag systems. A skew-symmetric proof-mass has been designed for self-diagnostic capability and zero transverse sensitivity. Two kinds of multi-step anisotropic etching processes are developed for beam thickness control and fillet-rounding formation, UV-curing paste has been used for sillicon-to-glass bounding. The resonant frequency of 2.07kHz has been measured from the fabricated devices. The sensitivity of 195
Keywords
Micromachining;Silicon Accelerometer;Air-bag;Cross-Axis Sensitivity;Skew-Symmetric Proof-Mass;Piezoresistive Detection;Self-Diganosis;Air-Damping;Multi-Step Anisotropic Etch;Fillet-Rounding Formation
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References
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- SAE 912390 Comparison of Airbag Sensors Using Computer Simulation Sakakida, M.
- 석사학위논문 자동차 에어백용 극소형 실리콘 가속도 센서의 설계 및 제작 고종수
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- Tech. Dig. IEEE Solid-State Sensors and Actuators Workshop Squeeze-film Damping in Solid-State Accelerometers Starr, J. B.
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