Design, Fabricaiton and Testing of a Piezoresistive Cantilever-Beam Microaccelerometer for Automotive Airbag Applications

에어백용 압저항형 외팔보 미소 가속도계의 설계, 제작 및 시험

  • Ko, Jong-Soo (Dept. of Mechanical Engineering, Graduate School of Korea Advanced Institute of Science and Technology) ;
  • Cho, Young-Ho (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kwak, Byung-Man (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Park, Kwan-Hum
  • 고종수 (한국과학기술원 대학원 기계공학과) ;
  • 조영호 (한국과학기술원 기계공학과) ;
  • 곽병만 (한국과학기술원 기계공학과) ;
  • 박관흠 (현대자동차(주) 연구개발부)
  • Published : 1996.02.01


A self-diagnostic, air-damped, piezoresitive, cantilever-beam microaccelerometer has been designed, fabricated and tested for applications to automotive electronic airbag systems. A skew-symmetric proof-mass has been designed for self-diagnostic capability and zero transverse sensitivity. Two kinds of multi-step anisotropic etching processes are developed for beam thickness control and fillet-rounding formation, UV-curing paste has been used for sillicon-to-glass bounding. The resonant frequency of 2.07kHz has been measured from the fabricated devices. The sensitivity of 195 $\mu{V}$/g is obtained with a nonlinearity of 4% over $\pm$50g ranges. Flat amplitude response and frequency-proportional phase response have been obserbed, It is shown that the design and fabricaiton methods developed in the present study yield a simple, practical and effective mean for improving the performance, reliability as well as the reproducibility of the accelerometers.


Micromachining;Silicon Accelerometer;Air-bag;Cross-Axis Sensitivity;Skew-Symmetric Proof-Mass;Piezoresistive Detection;Self-Diganosis;Air-Damping;Multi-Step Anisotropic Etch;Fillet-Rounding Formation


  1. 석사학위논문 자동차 에어백용 극소형 실리콘 가속도계의 설계를 위한 연구 조남규
  2. SAE 912390 Comparison of Airbag Sensors Using Computer Simulation Sakakida, M.
  3. 석사학위논문 자동차 에어백용 극소형 실리콘 가속도 센서의 설계 및 제작 고종수
  4. 대한민국발명특허(출원번호 94-25687) 자체진단 기능을 구비한 대칭질량형 가속도계 및 그 제조방법 조영호;곽병만;이귀로;박관흠
  5. Sensors and Actuators v.6 Design Optimization for Cantilever-Type Accelerometer Seidel, H.;Csepregi, L.
  6. 한국자동차공학회지 v.14 no.3 자동차용 반도체 집적 센서 및 마이크로 엑츄에이터 조영호
  7. Tech. Dig. IEEE Solid-State Sensors and Actuators Workshop Squeeze-film Damping in Solid-State Accelerometers Starr, J. B.
  8. IEEE Trans. Electron Devices v.ED-27 no.12 A Batch-Fabricated Silicon Accelerometer Roylance, L. M.;Angell, J. B.
  9. Tranducers '87 The Mechanism of Anisotropic Silicon Etching and Its Relevance for Micromaching Seidel, H.
  10. Transducers'87 A Silicon Based Micromechamical Accelerometer with Cross Acceleration Sensitivity Compensation Sandmaier, H.;Kuhi, K.;Obermeier, E.