Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지
DOI QR코드

DOI QR Code

Design, Fabrication and tTsting of a Microswitch Using Snap-through Buckling Phenomenon

스냅스루 좌굴을 이용한 미소스위치의 설계, 제작 및 실험

  • Go, Jeung-Sang (Dept. of Mechanical Engineering, Graduate School of Korea Advanced Institute of Science and Technology) ;
  • Cho, Young-Ho (Dept. of Mechanical Engineering, Graduate School of Korea Advanced Institute of Science and Technology) ;
  • Kwak, Byung-Man (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Park, Kwan-Hum
  • 고정상 (한국과학기술원 대학원 기계공학과) ;
  • 조영호 (한국과학기술원 대학원 기계공학과) ;
  • 곽병만 (한국과학기술원 기계공학과) ;
  • 박관흠 (현대 자동차(주)연구 개발부)
  • Published : 1996.02.01

Abstract

A snapping-beam microswitch has been designed, fabricated and tested. From a design analysis, necessary and sufficient conditions for a snap-through switching fouction have been derived for a clamped shallow beam. The necessary condition has resulted in a geometric relation, in which the ratio of beam thickness to initial beam deflection plays a key role in the snapping ability. The sufficient condition for the snapping action has been obtained as a function of the inertia force due to applied acceleration, and the electrostatic force, adjustable by an inter-electrode voltage. For experimental investigations, a set of microbeams of silicon dioxide/$P^+$silicon bimorphs have been fabricated. Geometric size and mechanical behavior of each material film have been measured from on-chip test structures. Estimated and measured characteristics of the fabricated devices are compared.

Keywords

Micromachining;Microswitch;Snapthrough Buckling;Acceleration Switch;Micromaterials;Blister Test

File

Download PDF

References

  1. An Introduction to the Elastic Stability of Structures Simitese, G. J.
  2. Theory of Plates and Shells Timoshemko, S. P.
  3. Proc. MRS The In-Situ Measurement of Biaxial Modulus and Residual Stress of Multi-Layer Ploymeric Thin Films Lin, P.;Senturia, S. D.
  4. Proc. IEEE Micro Electro Mechanical Systems Workshop Self-Adjusting Micro-Structures Judy, M. W.;Cho, Y.-H.;Howe, R. T.;Pisano, A. P.
  5. 대한기계학회지 v.33 no.6 미소기전집적 시스템에서의 미소 기계공학 조영호
  6. Stress-Related Effects in Thin Films Thornton, J. A.
  7. 기계기술 v.20 no.12 마이크로머시닝 기술과 마이크로머신 조영호