- Volume 20 Issue 2
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Design, Fabrication and tTsting of a Microswitch Using Snap-through Buckling Phenomenon
스냅스루 좌굴을 이용한 미소스위치의 설계, 제작 및 실험
- Published : 1996.02.01
A snapping-beam microswitch has been designed, fabricated and tested. From a design analysis, necessary and sufficient conditions for a snap-through switching fouction have been derived for a clamped shallow beam. The necessary condition has resulted in a geometric relation, in which the ratio of beam thickness to initial beam deflection plays a key role in the snapping ability. The sufficient condition for the snapping action has been obtained as a function of the inertia force due to applied acceleration, and the electrostatic force, adjustable by an inter-electrode voltage. For experimental investigations, a set of microbeams of silicon dioxide/
Micromachining;Microswitch;Snapthrough Buckling;Acceleration Switch;Micromaterials;Blister Test
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