Design, Fabrication and tTsting of a Microswitch Using Snap-through Buckling Phenomenon

스냅스루 좌굴을 이용한 미소스위치의 설계, 제작 및 실험

  • Published : 1996.02.01


A snapping-beam microswitch has been designed, fabricated and tested. From a design analysis, necessary and sufficient conditions for a snap-through switching fouction have been derived for a clamped shallow beam. The necessary condition has resulted in a geometric relation, in which the ratio of beam thickness to initial beam deflection plays a key role in the snapping ability. The sufficient condition for the snapping action has been obtained as a function of the inertia force due to applied acceleration, and the electrostatic force, adjustable by an inter-electrode voltage. For experimental investigations, a set of microbeams of silicon dioxide/$P^+$silicon bimorphs have been fabricated. Geometric size and mechanical behavior of each material film have been measured from on-chip test structures. Estimated and measured characteristics of the fabricated devices are compared.


Micromachining;Microswitch;Snapthrough Buckling;Acceleration Switch;Micromaterials;Blister Test


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