# 수평공진형 다결정실리콘 미소액추에이터의 설계, 제작 및 시험

• Jo, Yeong-Ho (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
• 조영호 (한국과학기술원 기계공학과)
• Published : 1996.05.01
• 35 3

#### Abstract

This paper presents the design, fabrication, and testing of polysilicon electrostatic microactuators that resonate in the direction parallel to the silicon susbstrates. A set of six different designs has been developed using a theoretical model and design formulae developed for the mocroactuators. Microactuator prototypes are fabricated from a 2.1 $\mu{m}$-thick LPCVD polysilicon film, using a 4-mask surface-micromachining process. The prototypes are tested under a d.c. bias voltage of 45V with an a.c. drive voltage amplitude of 20 v.Measured resorant frequencies are in the ranges of 40-60 kHz, showing a good agreement to their theoretical estimates within error bounds of .$\pm$.5%. Important issues inthe design and microfabrication of the microactuators are discussed, together with potential applicaitons of the key technology involved.

#### Keywords

Microactuators;Microfabrication Process;Surface-Micromachining;Resonant Microstructures;Electrostatic Actuation;Micromachine;Microelectromechanics